Veeco Instruments Inc.

Edward W Ostan

Alan V Hayes

Emmanuel N Lakios

Victor Kanarov

Roger P Fremgen, Jr

Abraham J Navy

John Jacob

Genrikh Treyger

A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam &ldquo;on&rdquo; and beam &ldquo;off&rdquo; states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.

Charged-particle source, control system and process using gating to extract the charged particle beam

A control system and process for operating a charged-particle source which achieves gating of the charged-particle beam without a mechanical shutter and with very short transition between the beam 'on' and beam 'off' states is presented. The process and control system provide very precise control of the duration of the charged-particle extraction.

Charged-particle source, control system, and process using gating to

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Huntington, NY, United States of America

Edward W Ostan