Az Electronic Materials USA Corp.

Merck Patent Gmbh

Edward W Ng

Munirathna Padmanaban

Srinivasan Chakrapani

Francis Michael Houlihan

Mark O Neisser

Takanori Kudo

Alberto D Dioses

Shinji Miyazaki

Ralph R Dammel

The present invention relates to a novel styrenic polymer comprised of the repeat units of structures (I), (II), and (III), wherein R, Rand Rare individually selected from H or a C-1 to C-4 linear alkyl, R, Rand Rare individually selected from a C-1 to C-8 linear alkyl, a C-3 to C-8 linear alkyl and a C-3 to C-8 cyclic alkyl and to the novel composition comprised of this polymer and a spin on organic solvent. In another aspect of this invention it pertains to the use of this composition to create a grafted on a substrate, and a further aspect, this grafted film may be used in a directed self-assembly process. 

Hydrophobic pinning mat for directed self-assembly of diblock copolymer novel compositions and processes for self-assembly of block copolymers

The invention relates to a photoimageable antireflective coating composition capable of forming a pattern by development in an aqueous alkaline solution, comprising, (i) a polymer A soluble in a coating solvent and comprises a chromophore, a crosslinking moiety, and optionally a cleavable group which under acid or thermal conditions produces a functionality which aids in the solubility of the polymer in an aqueous alkaline solution and; (ii) at least one photoacid generator; (iii) a crosslinking agent; (iv) optionally, a thermal acid generator; (v) a polymer B which is soluble in an aqueous alkaline solution prior to development, where polymer B is non-miscible with polymer A and soluble in the coating solvent, and; (vi) a coating solvent composition, and (vii) optionally, a quencher. The invention also relates to a process for imaging the antireflective coating.

Positive-working photoimageable bottom antireflective coating

The present invention relates to an antireflective coating composition comprising a crosslinking agent, a polymer comprising at least one chromophore group and at least one hydroxyl and/or a carboxyl group, and an additive, further where the additive has structure 1 and comprises at least one arylene-hydroxyl moiety, where Y is selected from an carboxylate anion or sulfonate anion, R, R, and Rare independently selected from unsubstituted C-Calkyl, substituted C-Calkyl, aryl and arylene-hydroxyl; X, X, and Xare independently selected from direct valence bond and C-Calkylene group, and, n=1, 2 or 3. The invention further relates to a process for using the composition.

Bottom antireflective coating compositions and processes thereof

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Belle Mead, NJ, United States of America

Edward W Ng