Lam Research Corporation

Tesla, Inc.

Solarcity Corporation

Edward Sung

Colin F Smith

Shawn M Hamilton

Alan M Schoepp

Kevin Madrigal

James Zu-Yi Liu

Harald Te Nijenhuis

Jeffrey E Lorelli

Showerheads for semiconductor processing equipment are disclosed that include various features designed to minimize or eliminate non-uniform gas delivery across the surface of a wafer due to gas flow transients within the showerhead.

Anti-transient showerhead

An improved vaporizer for vaporizing a liquid precursor is provided. The vaporizer may include one or more channels with a relatively large wall-area-to-cross-sectional-flow-area ratio and may be equipped with one or more heater elements configured to heat the channels above the vaporization temperature of the precursor. At least some of the channels may be heated above the vaporization temperature but below the Leidenfrost temperature of the precursor. In some implementations, a carrier gas may be introduced at high speed in a direction generally transverse to the precursor flow to mechanically shear the precursor into droplets. Multiple vaporizers may be ganged together in series to achieve complete vaporization, if necessary. The vaporizers may be easily disassembleable for cleaning and maintenance.

Configurable liquid precursor vaporizer

One embodiment can provide a system for curing conductive paste applied on photovoltaic structures. The system can include a wafer carrier for carrying a plurality of photovoltaic structures and a heater. The wafer carrier can include a surface element that is in direct contact with the photovoltaic structures and is substantially thermally insulating. The heater can be positioned above the wafer carrier. The heater can include a heated radiation surface that does not directly contact the photovoltaic structures.

Systems, method and apparatus for curing conductive paste

Systems and methods are described for transferring wafers between processing steps in the fabrication of solar cells. The wafers may be processed using a cluster tool including a load-lock, a plurality of processing modules, and a central robot to transfer wafers between the plurality of modules. Each module may include a pedestal including wafer recesses to support the wafers, and puck recesses for supporting ferromagnetic pucks below the wafers. The central robot includes electromagnets for attracting the ferromagnetic pucks toward the electro magnets in order to clamp the wafers between the ferromagnetic pucks and the electromagnets.

Magnetic wafer gripper

An improved vaporizer for vaporizing a process fluid is provided. The vaporizer may be assembled from stacked plates and may include one or more plenums with a relatively large wall-area-to-cross-sectional-flow-area ratio. The vaporizer may be equipped with one or more heating elements configured to heat the plenums above the vaporization temperature of the precursor. At least some of the plenums may be heated above the vaporization temperature, but below the Leidenfrost temperature, of the precursor. Multiple stacked plate arrangements may be ganged together in series to achieve complete vaporization, if necessary. The vaporizers may be easily disassembleable for cleaning and maintenance.

Modular vaporizer

A heated filter assembly for heating gas supplied to a substrate processing system includes a housing defining a cavity, an inner surface and an outer surface. A filter element is arranged inside the cavity of the housing with an outer surface thereof in a spaced relationship relative to the inner surface of the housing. A heat transfer element is arranged inside of the filter element and includes an outer surface and an inner cavity. A plurality of projections is arranged on the outer surface of the heat transfer element in direct physical contact with an inner surface of the filter element. A plurality of portions is arranged on the outer surface of the heat transfer element, is spaced from the inner surface of the filter element and is located between the plurality of projections.

Growing community of inventors

Milpitas, CA, United States of America

Edward Sung