International Business Machines Corporation

Edward Sumner Begle

Kevin Shawn Petrarca

Richard Paul Volant

Olivier Verscheure

Deepak Srinivas Turaga

Lisa Amini

Richard Philip Surprenant

Justin Wai-chow Wong

Brian Douglas Pfeifer

Mathias Pierre Jeanneret

Nancy Wagner Hannon

Gerett Raybourn Yocum

A technique for analyzing two or more data streams respectively generated from two or more components of a controllable process includes the following steps. In a first step, a statistical analysis is performed on each of the two or more data streams to generate first analysis results in the form of respective statistical results for the two or more data streams. In a second step, at least a portion of the statistical results from at least one of the two or more data streams is combined with at least a portion of the statistical results from at least another one of the two or more data streams to yield second analysis results. The controllable process is adjustable based on at least one of the first analysis results and the second analysis results.

Hierarchical and incremental multivariate analysis for process control

A multilayer thin film via landing pad structure includes a thin film conductor structure with a recessed landing pad formed between an upper layer of polyimide dielectric and a lower layer of polyimide dielectric. A multilayer thin film via landing pad structure is formed on a lower layer of dielectric having a top surface. A depression is formed in the top surface of the lower layer of dielectric. The depression has a bottom within the lower layer. A recessed landing pad comprising a conductor is formed in the depression on the surface of the lower layer of dielectric. A conductor line is formed on the lower layer of dielectric in contact with the recessed landing pad. An upper layer of dielectric is formed over the lower layer of dielectric, the thin film conductor line and the recessed landing pad. A conductive via is formed extending through the upper layer of dielectric into contact with the recessed landing pad. Both the recess and the via are formed by laser ablation with the identical mask and laser ablation tool.

Method of forming recessed thin film landing pad structure

A method for forming a crack stop structure and a barrier to the diffusion of oxygen and water vapor in integrated circuits is provided.

Method of forming a crack stop structure and diffusion barrier in integrated circuits

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Middletown, NY, United States of America

Edward Sumner Begle