International Business Machines Corporation

Edward Sherwood

Philip L Campbell

Uldis Artis Ziemins

David J Pinckney

David L Schmoke

Paul D Hand

Jeffrey P Gifford

Ray A Reyes

Nicholas Frank Ciminello

Denise B Joe

Methods, systems and apparatus for swapping pods within a semiconductor processing tool during a substrate processing cycle. A dirty pod carrying a substrate in need of processing is provided within the processing tool, and the substrate is transferred into a processing chamber thereof. At least one clean pod is also provided within the processing tool. Upon substrate processing completion, the processed substrate is transferred from the chamber directly into a clean pod within the processing tool. Wherein a plurality of substrates are processed within the chamber, a plurality of clean pods may be provided within the tool whereby the plurality of substrates are transferred into a single clean pod or split into subsets that are transferred into different clean pods within the processing tool. The clean pod(s) carrying the processed substrate(s) are then transferred to other tool(s) for continued semiconductor fabrication processing.

Pod swapping internal to tool run time

A system for reading substrate carriers that includes at least one overhead transport vehicle (OHT) utilizing at least one device for at least one of sensing and/or reading a substrate carrier, and/or wafers arranged therein, when the substrate carrier is proximate the at least one overhead transport vehicle. A method of sensing or reading a substrate carrier includes sensing and/or reading a substrate carrier and/or wafers arranged therein with the overhead transport vehicle.

Semiconductor automation buffer storage identification system and method

A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Reticle storage pod (RSP) transport system utilizing FOUP adapter plate

A system and storage medium for providing continuous communication between passive and active equipment are provided. The system includes a conversion unit coupled to at least one the passive and active equipment, which monitors signals received from the equipment. The signals relate to an equipment state. Upon detecting a state change, the system converts a signal associated with the state change to a TCP/IP-formatted request. The system also includes a message handler coupled to the conversion unit, which receives the request from the conversion unit and transmits the request to a host system. The message handler also removes TCP/IP formatting from the request resulting in a file transfer protocol message. The conversion unit converts the file transfer protocol message to a signal and responds to the signal by the equipment. The conversion includes decoding the file transfer protocol message and setting a signal line to a requested state.

Method, system, and storage medium for providing continuous communication between process equipment and an automated material handling system

Exemplary embodiments of the invention include a method and system for providing continuous communication between passive equipment and active equipment. The method includes monitoring signals received from a passive equipment or active equipment. The signals relate to at least one equipment state. Upon detecting a state change, the method also includes converting a signal associated with the state change to a TCP/IP-formatted request, and transmitting the request to a host system.

A reticle SMIF pod includes a dome having a plurality of latchkeys and a cassette having a plurality of primary engagement locations thereon into which the latchkeys are intended to engage when sealing the cassette to the dome. A plurality of secondary engagement locations are positioned in the cassette above the plurality of primary engagement locations to prevent the cassette from falling should the plurality of latchkeys fail to engage in the primary engagement locations.

Secondary latchkey mechanism and method for reticle SMIF pods

A test fixture for evaluating an RF identification system and related methods for evaluating an RF tag and/or an RF antenna, are disclosed. The test fixture provides predefined RF tag positions that can be used to test: read position, distance and antenna capability and adjustments. By placing an actual RF tag in each of the predefined positions, a read of the tag information can be performed. A three dimensional plot can then be established for the sensitivity field of the antenna. By placing the RF tag in various positions and orientations, the antenna can be adjusted until an optimum field is produced. The invention can also be used to determine RF tag performance within the optimized field.

Growing community of inventors

Wingdale, NY, United States of America

Edward Sherwood