Applied Materials, Inc.

Hgst Netherlands, B.v.

Edward Ng

Ayan Majumdar

Jeffrey C Hudgens

John Joseph Mazzocco

Justin Mauck

Douglas MacLeod

Joseph Arthur Kraus

David Phillips

Edward R Dykes

Brian Johnson

Andrew Nguyen

Eric Andrew Englhardt

Sushant Suresh Koshti

Travis Morey

George Anthony Dunn

Adam J Wyatt

Steve S Hongkham

Methods, apparatus, and assemblies are provided for a substrate carrier adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.

Carrier adapter insert apparatus and carrier adapter insert detection methods

An electronic device manufacturing system may include a loadlock. The loadlock may include a plurality of gas line heaters for providing a heated gas to the loadlock to heat a processed substrate therein. Heating a processed substrate may reduce corrosion in the loadlock and subsequent contamination of substrates therein. The loadlock may also include a plurality of embedded heaters in the loadlock housing to reduce moisture therein, further reducing corrosion and contamination. Methods of heating a substrate in a loadlock are also provided, as are other aspects.

Electronic device manufacturing systems, methods, and apparatus for heating substrates and reducing contamination in loadlocks

In some embodiments, methods and systems are provided for improved handling of lithography masks including loading a mask via a first load port from a first carrier; inverting the mask using a first contact pad; cleaning the mask; inverting the mask using a second contact pad; and unloading the mask via a second load port into a second carrier. Numerous other aspects are provided.

Methods and systems for improved mask processing

Methods, apparatus, and assemblies are provided for an adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.

Transfer chamber gas purge apparatus are disclosed. The transfer chamber gas purge apparatus has a transfer chamber adapted to contain at least a portion of a transfer robot, the transfer chamber including side walls, a chamber lid, and a chamber floor, wherein the chamber lid has a plurality of distributed chamber inlets. The plurality of distributed chamber inlets may include diffusing elements. Laminar purge gas flow may be provided above the substrate. Systems and methods including a plurality of distributed chamber inlets are disclosed, as are numerous other aspects.

Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods

A base layer for a suspension. The base layer includes a structure. The structure has a slider end portion and a tail portion. The structure includes an opening in the tail portion. The opening provides access to a conductive assembly coupleable there with. The structure also includes a strengthening member integrated within said opening.

High bandwidth and mechanical strength between a disk drive flexible circuit and a read write head suspension

In a first aspect, a valve/sensor assembly is provided that includes a door assembly. The door assembly has (1) a first position adapted to seal an opening of a chamber; (2) a second position adapted to allow at least a blade of a substrate handler to extend through the opening of the chamber; and (3) a mounting mechanism adapted to couple the door assembly to the chamber. The valve/sensor assembly also includes a sensor system having a transmitter and a receiver adapted to detect a presence of a substrate and to communicate through at least a portion of the door assembly. Systems, methods and computer program products are provided in accordance with this and other aspects.

Growing community of inventors

San Jose, CA, United States of America

Edward Ng