Asyst Technologies, Inc.

Edward J Cortez

Anthony C Bonora

Michael D Brain

Robert R Netsch

Michael Ng

Barney H Huang

Bruce A Richardson

John D Kyffin

J Mark DiPaola

A tilt and go assembly included as part of a load port interface assembly is disclosed for providing quick and easy attachment and adjustment of the load port interface assembly to a BOLTS interface. When a load port interface assembly according to the present invention is positioned adjacent to a BOLTS interface, the assembly is tilted away from the BOLTS interface, so that a socket in the load port interface assembly may raise upward slightly and be seated on the ball joint. Thereafter, the upper portions of the load port interface assembly may be tilted upward so that the assembly is roughly parallel and adjacent to the BOLTS interface. Once the load port interface assembly is seated on the ball joint of the BOLTS interface, the vertical and lateral positions of the load port interface assembly may be adjusted as desired with respect to the BOLTS interface. Additionally, after the vertical and lateral positions of the load port interface assembly have been adjusted, the azimuth and roll angle of the load port interface assembly may be adjusted with respect to the BOLTS interface.

Tilt and go load port interface alignment system

A universal interface and transfer apparatus is disclosed which may be configured either as an indexer or a load port opener. In each configuration, the universal interface and transfer apparatus includes a port plate having a central opening, and a port door fitting within and sealing the central opening when no pod is present on the apparatus. The apparatus further includes a base and a frame mounted on and extending up from a front of the base. A modular drive assembly is mounted within an exterior side of the frame, which drive assembly includes a linear drive screw, and a motor and torque transmission mechanism for rotating the linear drive screw. A carriage is mounted on the linear drive screw such that rotation of the linear drive screw results in vertical translation of the carriage. In a first configuration, the port plate is mounted to the carriage via a bracket extending between the port plate and carriage so that rotation of the linear drive screw will vertically translate the port plate while the port door remains stationary. In a second configuration, the port door is mounted to the carriage via an arm extending between the port door and carriage, while the port plate is stationarily mounted to the frame so that rotation of the linear drive screw will vertically translate the port door while the port plate remains stationary.

Universal tool interface and/or workpiece transfer apparatus for SMIF

A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.

Human guided mobile loader stocker

Growing community of inventors

San Jose, CA, United States of America

Edward J Cortez