Tokyo Electron Limited

Varian Semiconductor Equipment Associates, Inc.

Edward Heller

Akiteru Ko

Masafumi Urakawa

Takashi Enomoto

Arthur H Laflamme, Jr

Masaaki Hagihara

Shinji Hamamoto

A gas injection system includes a diffuser to distribute a process gas in a processing chamber. The gas injection system may be utilized in a polysilicon etching system involving corrosive process gases.

Reduced contaminant gas injection system and method of using

An electrical switch includes a tubular housing constructed substantially of a non-conductive material, a first electrical contact positioned at one end of the housing, a second electrical contact positioned at a second end of the housing, and a shuttle selectively displaceable within the housing between the first electrical contact and the second electrical contact. The shuttle is electrically connected to the first electrical contact. A spring mechanism positioned within the housing and connected to the shuttle biases the shuttle into a first position proximate the first electrical contact. The shuttle is displaceable into engagement with the second electrical contact by pressurized gas to establish an electrical connection between the first electrical contact and the second electrical contact. The disclosed switch may be employed to selectively ground the components of an ion implantation system and is particularly suitable for use in high-voltage environments.

Electrical switches and methods of establishing an electrical connection

Growing community of inventors

Bedford, MA, United States of America

Edward Heller