The Boc Group, Inc.

Osaka Sanso Kogyo Ltd.

Edward Frederick Ezell

Walter H Whitlock

Akira Makihara

Takahiko Kijima

Junichi Nishizawa

Edward Deming Tang

Richard A Hogle

Juinchi Nishizawa

Graham A McFarlane

A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas.

Method of recycling fluorine using an adsorption purification process

An apparatus and method for purifying boron trichloride by removal of phosgene. In accordance with the invention, phosgene is photolytically decomposed into carbon monoxide and chlorine and liquid vapor phase in equilibrium with one another and in solution with the boron trichloride. This equilibrium is disturbed preferably by sparging a vapor stream that rises through the boron trichloride and is composed of the substance, such as nitrogen, to disturb the equilibrium and thereby cause the carbon monoxide and chlorine to be carried out of solution and collect in the overhead space. The decomposition product of chlorine and carbon monoxide can then be removed from the vapor space so that the carbon monoxide and chlorine to not recombine and contaminant the boron trichloride with phosgene.

Apparatus and method for purifying boron trichloride by removal of

An apparatus and method for purifying boron trichloride by removal of phosgene. In accordance with the invention, phosgene is photolytically decomposed into carbon monoxide and chlorine and liquid vapor phase in equilibrium with one another and in solution with the boron trichloride. This equilibrium is disturbed preferably by sparging a vapor stream that rises through the boron trichloride and is composed of the substance, such as nitrogen, to disturb the equilibrium and thereby cause the carbon monoxide and chlorine to be carried out of solution and collect in the overhead space. The decomposition product of chlorine and carbon monoxide can then be removed from the vapor space so that the carbon monoxide and chlorine does not recombine and contaminate the boron trichloride with phosgene.

The invention relates to an apparatus for determining the frost point of a gas containing a very small amount of water. The apparatus comprises (I) compartment A made of a good heat conductor; (II) an inlet for the gas to be measured, which inlet is provided on compartment A; and (III) a heater for adjusting the temperature in compartment A, and a temperature sensor. The apparatus further comprises (IV) compartment B which is adjacent to compartment A. At least part of compartment B is made of a poor heat conductor. Further, the apparatus comprises (V) a hole at the interface between compartments A and B and (VI) a reflector mirror having a temperature sensor. The reflector mirror is provided on compartment B in such a way as to cover the hole is connected thermally to a freeze source in such a way that the temperature of the reflector mirror can be varied from room temperature to at least -80.degree. C. Also, the apparatus comprises (VII) a gas outlet provided on compartment B; (VIII) a small gap formed between the hole and the reflector mirror; (IX) a device that allows convergent rays of light or laser light to be emitted onto the surface of the reflector mirror; and (IX) a photodetector equipped with a condenser lens. The condenser lens condenses light from frost formed on the surface of the reflector mirror when said gas to be measured contacts said mirror and said water in said gas condenses as frost. Finally the apparatus comprises (XI) a detector device that senses the temperature at which frost occurs on the reflector mirror.

Apparatus for measuring the dew point or frost point of a gas having low

A method of determining the dew point of a gas containing a very small amount of water using (1) a reflector mirror the temperature of which can be varied from room temperature down to at least -80.degree. C.; (2) a source of condensed rays of light for irradiating the reflector mirror; and (3) a light recovering device that detects changes in scattered light due to condensation on the reflector mirror by exposing the mirror to the gas. The method comprises cooling the mirror and detecting the temperature at which the scattered light has a maximum intensity; slowly raising the temperature and detecting the temperature at which the scattered light has a minimum intensity and repeating the cycle until the temperature at which the intensity is a maximum and the temperature at which the intensity is a minimum are almost the same.

Method and apparatus for measuring the dew point and/or frost point of a

A method of cleaning a reflector mirror in an optical dew point meter that measures the dew point or frost point of a sample gas by a process including the steps of bringing the sample gas into contact with the reflector mirror whose temperature is variable, projecting condensed rays of light or laser light onto said reflector mirror, and detecting the change in the intensity of scattered light and/or reflected light on account of the dew or frost formed on said reflector mirror, characterized by bringing a CO.sub.2 gas or a CO.sub.2 containing gas into contact with the reflector while the latter is in a cooled state, thereby condensing CO.sub.2 on the surface of the reflector mirror, and the subsequent step of heating the reflector mirror to vaporize the CO.sub.2 is dischosed.

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Warren, NJ, United States of America

Edward Frederick Ezell