Cyberoptics Semiconductor, Inc.

Edward D Seeberger Jr

Samuel J Cole

Ric DeHoff

A wafer mapping sensor assembly includes a housing, and an imaging array positioned therein. Imaging optics are positioned relative to the array to focus an image upon the array. An illumination source is configured to direct illumination toward the wafer, where such illumination is reflected by the wafer. An optical element is interposed between the source and the wafer. The optical element directs the illumination to reduce the effects of undesirable illumination.

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Portland, OR, United States of America

Edward D Seeberger Jr