Tokyo Electron Limited

International Business Machines Corporation

Edward C Hume, Iii

James E Willis

Satoshi Harada

Hongyu Henry Yue

Javad Haj-ali-Ahmadi

Hieu A Lam

James Edmund Klekotka

Kevin Andrew Chamness

David Fatke

A method of using an APC system to perform a data pre-population function is described in which the APC system is coupled to a processing element. The APC system comprises an APC computer including operational software, a database coupled to the APC computer, and a GUI, and the processing element comprises at least one of a tool, a processing module, and a sensor. When the APC system operates, the APC system collects data from the processing element and stores the collected data in the database. When an APC malfunction occurs, a data recovery (data pre-population) can be performed. When some of the historical data is missing, a data recovery (data pre-population) can be performed. When an APC system is coupled to a new tool having some historical data, a data recovery (data pre-population) can be performed.

Method for data pre-population

A method of automatically configuring an Advanced Process Control (APC) system for a semiconductor manufacturing environment in which an auto-configuration script is generated for executing an auto-configuration program. The auto-configuration script activates default values for input to the auto-configuration program. The auto-configuration script is executed to generate an enabled parameter file output from the auto-configuration program. The enabled parameter file identifies parameters for statistical process control (SPC) chart generation.

Method for automatic configuration of processing system

A method and apparatus are provided for placing a plurality of Stock Keeping Units (SKUs), e.g., brands in transport units wherein quantities of SKUs, not equal to standard SKU packages, e.g. cases, can be ordered. A material handling system, including a work area, robot, conveyors, and the like, is used in conjunction with a computer implemented planning method. The planning method determines the sequence for filling transport units by initially assigning transport units to the work area. Only one transport unit per order is assigned to the work area at a single time. The SKUs are then ranked depending on their difficulty in placement. If a partial package is required, it is considered more difficult that full packages and placed before the required full packages of that SKU. The planning method completes the oldest transport unit in the work area and attempts to place the most difficult SKUs first.

System and method for partial order filling

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Austin, TX, United States of America

Edward C Hume, Iii