Kla Tencor Corporation

Kla Corporation

Eduardo Soto

Garry Allen Rose

Joseph Walsh

Gildardo Rios Delgado

Damon Floyd Kvamme

Ali R Ehsani

I-Fan Wu

Christopher Davis

Sarbjit Singh Grewal

Joseph Armstrong

Kent McKernan

Orlando Threet

David Jalil Zare

Frank Barkusky

Bernd Burfeindt

An enclosure surrounding the optical component can be connected with a vapor source. The vapor source can provide a vapor to the enclosure with a vapor level from 500 ppm to 15000 ppm. The concentration of vapor in the enclosure can increase the lifespan of the optical component in the enclosure.

Vapor as a protectant and lifetime extender in optical systems

A device includes spectral purity filters (SPF) and structures for supporting SPF films. The device further includes a monolithic support having a mesh portion and a frame portion and a film overlaying at least a portion of the support. In some cases, the film can be affixed to the support without an adhesive. The monolithic support can be Silicon, stainless steel or some other suitable material and the film can be a single layer spectral purity filter film or a multilayer spectral purity filter film. The mesh portion of the support can include a plurality of through-holes that are formed by etching and/or eroding a thinned material such as silicon or stainless steel.

Spectral purity filters (SPF), support structures for SPF films and corresponding methods of manufacture

Growing community of inventors

Campbell, CA, United States of America

Eduardo Soto