Edwards Japan Limited

Societe De Mecanique Magnetique

Societe De Macanique Magnetique

Eduardo Carrasco

Ulrich Schroder

Benoit Henry

Satoshi Okudera

A vacuum pump including a pump main unit and a control unit is disclosed. The control unit includes a substrate having electronic elements mounted thereon and terminal pins soldered to the substrate at a first end edge of the substrate. The substrate is mounted to a plate via an attachment near a second end edge opposing the first end edge and the plate is mounted to the pump main unit. The terminal pins extend through the plate. Upon linear thermal expansion of the terminal pins, by reason of the location of the terminal pins near the first end edge and the attachment near the second end edge, stresses in the soldered pin connections are reduced. A molding material having a Shore hardness of less than 50, is molded around the electronic elements on the substrate in one embodiment.

Reducing the influence of thermal expansion of connector pins on a substrate in a vacuum pump

A vacuum pump having substrates which can be wired together easily and cooled easily. A substrate unit structure is formed by covering the opening of the casing of the pump main unit with a plate functioning also as the casing of the control unit. Pins of a terminal fixed while penetrating the plate are soldered directly to an active magnetic bearing (AMB) control substrate and an aerial connection substrate in order to integrate these components. The casing and sealing structures can be of simple construction. A drip-proof structure can be made with the terminal at low cost without using expensive drip-proof connectors. Further, by cooling the plate, electronic components mounted respectively on the AMB control substrate in a vacuum atmosphere and the aerial connection substrate in an air atmosphere can be cooled simultaneously.

Vacuum pump

The axially adjustable magnetic bearing comprises an annular body secured to a support, a magnetic bearing stator structure having an annular sheath for supporting electromagnet windings placed concentrically relative to said body, and an annular rotor armature placed concentrically relative to the stator structure, leaving an airgap relative thereto. The annular body includes at least one radial slot associated with clamping means, and includes a set-back portion in its face facing towards the stator structure. The face of the annular body facing towards the stator structure includes a sliding surface that co-operates with a facing portion of said sheath, and the set-back portion of the annular body presents a threaded portion that co-operates with a threaded portion of an adjustment ring engaged in an annular groove formed in the face of the sheath that faces towards the body. The adjustment ring is prevented from moving in the axial direction in said annular groove.

Growing community of inventors

Saint Marcel, France

Eduardo Carrasco