Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (2 from 3,768 patents)
2 patents:
1. 10770297 - Method to form ultrashallow junctions using atomic layer deposition and annealing
2. 10522354 - Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealing