The University of British Columbia

Edmond Cretu

Robert Rohling

Carlos D Gerardo

Mirza Saquib Sarwar

John Madden

Shahriar Mirabbasi

Yuta Dobashi

Chang Ge

Meisam Farajollahi

Ettore Glitz

According to at least one embodiment, a method of fabricating a micro electro-mechanical systems (MEMS) structure is disclosed. The method involves causing an etchant to remove a portion of a sacrificial layer of the MEMS structure, the sacrificial layer between a structural layer of the MEMS structure and a substrate of the MEMS structure. In this embodiment, causing the etchant to remove the portion of the sacrificial layer involves causing a target portion of the substrate to be released from the MEMS structure. According to another embodiment, another method of fabricating a MEMS structure is disclosed. The method involves causing an etchant including water to remove a portion of a sacrificial layer of the MEMS structure, the sacrificial layer between a structural layer of the MEMS structure and a substrate of the MEMS structure. In this embodiment, the sacrificial layer and the substrate are hydrophobic.

Methods of fabricating micro electro-mechanical systems structures

A method of sensing a pressure applied to a surface comprises monitoring an electrical signal generated by redistribution of mobile ions in a piezoionic layer under the surface. An externally applied local pressure at a portion of the layer induces redistribution of mobile ions in the piezoionic layer. It is determined that the surface is pressured based on detection of the electrical signal. A piezoionic sensor includes a sensing surface; a piezoionic layer disposed under the sensing surface such that an externally applied local pressure on a portion of the sensing surface causes detectable redistribution of mobile ions in the piezoionic layer; and electrodes in contact with the layer, configured to monitor electrical signal generated by the redistribution of mobile ions in the piezoionic layer.

Method and sensor for pressure sensing based on electrical signal generated by redistribution of mobile ions in piezoionic layer

Methods and techniques for fabricating layered structures, such as capacitive micromachined ultrasound transducers, as well as the structures themselves. The layered structure has a membrane that includes a polymer-based layer and a top electrode on the polymer-based layer. The membrane is suspended over a closed cavity and may be actuated by applying a voltage between the top electrode and a bottom electrode that may be positioned along or be a bottom of the closed cavity. The layered structure may be fabricated using a wafer bonding process.

Layered structure and method for fabricating same

Methods and techniques for fabricating layered structures using surface micromachining are described. A sacrificial layer is deposited on a substrate assembly that functions as a bottom electrode. The sacrificial layer is patterned into a first shape. A first polymer-based layer is deposited on the sacrificial layer. A top electrode is patterned on the first polymer-based layer above the sacrificial layer. A second polymer-based layer is deposited on the top electrode such that the top electrode is between the first and second polymer-based layers. The sacrificial layer is etched away to form a cavity under the top electrode.

Method for fabricating a layered structure using surface micromachining

Method for fabricating a layered structure using wafer bonding

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Edmond Cretu