Fei Comapny

Edgar Jan Dirk Vredenbregt

Alexander Henstra

Erik René Kieft

Otger Jan Luiten

Petrus Henricus Antonius Mutsaers

Fredericus Bernardus Kiewiet

Adam Christopher Lassise

The invention relates to a charged-particle microscope comprising The beam pulsing device comprises a unitary resonant cavity disposed about a particle-optical axis and has an entrance aperture and an exit aperture for the beam. The resonant cavity is configured to simultaneously produce a first oscillatory deflection of the beam at a first frequency in a first direction and a second oscillatory deflection of the beam at a second, different frequency in a second, different direction. The resonant cavity may have an elongated (e.g. rectangular or elliptical) cross-section, with a long axis parallel to said first direction and a short axis parallel to said second direction.

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Eindhoven, Netherlands

Edgar Jan Dirk Vredenbregt