Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Advanced Micro Devices Corporation (1 from 12,872 patents)
2. Silicon Valley Group, Inc. (1 from 47 patents)
3. Asml Holdings N.v. (1 from 23 patents)
3 patents:
1. 6662466 - Method for two dimensional adaptive process control of critical dimensions during spin coating process
2. 6327793 - Method for two dimensional adaptive process control of critical dimensions during spin coating process
3. 5767582 - Surface conditioning insulating layer for fine line conductive pattern