L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des

Softal Electronic Gmbh

Softal Electronic Erik Blumenfeld Gmbh & Co.

Softal Corona & Plasma Gmbh

Eckhard Prinz

Dominique Jouvaud

Pascal Bouard

Frank Slootman

Francedillaois Coeuret

Peter Palm

Frank Forster

Claus Lorentz

Bruno Kluss

Bernd Martens

Frank Förster

A method for continuous atmospheric plasma treatment of an electrically insulating workpiece. The workpiece is arranged at a distance beneath at least one high-voltage electrode which extends across a direction of movement. The electrode and the workpiece are set in motion relative to one another. The high voltage being applied to the high-voltage electrode, preferably is in the form of an AC voltage. A first space situated between the high-voltage electrode and the workpiece is filled with a first atmosphere and a second space on the side of the workpiece facing away from the high-voltage electrode is filled with a second atmosphere that is different from the first atmosphere. The second space is adjacent to a back side of the workpiece. The choice of high voltage and of the first and second atmospheres is made in such a way that a plasma discharge is ignited in the second atmosphere.

Method for continuous atmospheric pressure plasma treatment of workpieces

Disclosure of an electrode arrangement () as high voltage electrode for continual plasma treatment or plasma coating of web material with several knife electrodes () arranged at a right angle to any transport direction of the web material and essentially located parallely to each other which is characterized by the fact that the distances (a&#x2212;e) of adjacent knife electrodes () vary. In tests it has turned out that a more uniform coating result or, respectively, treatment result can be achieved with such an electrode arrangement than with comparable arrangements in which the knife electrodes are arranged equidistant. Preferably, the distances (a) between adjacent knife electrodes () are larger at the edges of the electrode arrangement () than the distances (e) between adjacent knife electrodes () in its center.

Electrode arrangement

A barrier electrode for the treatment of surfaces of electronically conductive or non-conductive materials with medium frequency electric discharges and a barrier electrode arrangement with one or more such barrier electrodes, wherein the barrier electrode is constructed as a tube of dielectric material with two ducts extending parallel to each other in the longitudinal direction of the tube. The duct which in the position of use faces the counter electrode is provided with a high voltage conductor and the other duct serves for supplying a temperature-influencing medium or a process gas.

Barrier electrode for treating surfaces of electrically conductive or non-conductive materials and arrangement of such barrier electrodes

A product substrate coated with a uniform deposit of silicon oxide created by subjecting the substrate to an electrical discharge with a dielectric barrier in the presence of a controlled atmosphere containing a silane and an oxidizing gas, the atmosphere being at a pressure higher than 10,000 Pa, and wherein the atmosphere is maintained in the immediate vicinity of an electrode in the region where the electrical discharge is produced and further wherein any entrainment of oxygen other than that forming part of the atmosphere in the region is prevented.

Silicon oxide on a substrate

A device for creating a deposit of silicon oxide on a traveling solid substrate, wherein the substrate is subjected to an electrical discharge with a dielectric barrier in the presence of a controlled atmosphere containing a silane and an oxidizing gas, the atmosphere being at a pressure higher than 10,000 Pa, and wherein the atmosphere is maintained in the immediate vicinity of an electrode in the region where the electrical discharge is produced and further wherein any entrainment of oxygen other than that forming part of the atmosphere in the region is prevented.

Device for creating a deposit of silicon oxide on a traveling solid

According to the process the substrate (2) is subjected to an electrical discharge with a dielectric barrier, for example a discharge in the presence of an atmosphere containing a silane, an oxidizing gas, NO, N.sub.2 O, CO.sub.2 or O.sub.2, in particular, and a neutral carrier gas such as nitrogen or argon. A controlled atmosphere containing the silane and the oxidizing gas is maintained in the immediate vicinity of the electrode, around the electrode (6) employed for the electrical discharge, while avoiding the process being perturbed by atmospheric air entrained, for example, by the substrate (2) as it travels (3).

Process for creating a deposit of silicon oxide on a traveling solid

The apparatus for the electrical pretreatment of foils to increase the surface tension (surface energy) comprising a roller electrode forming a counter-electrode and over which is passed the foil to be treated, and at least three knife electrodes, which are arranged parallel to one another and at right angles to the direction of movement of the foil. The discharge edges of the knife electrodes have a constant spacing from the roller electrode surface, which leads to a much better treatment result.

Growing community of inventors

Hamfelde, Germany

Eckhard Prinz