Siemens Aktiengesellschaft

Eckart Hundt

Elmar Trautenberg

Dietrich Hassler

Fritz Breimesser

Thomas Riegel

Peter Tischer

Manfred Ziegler

Gerd Maderlechner

Heinz Schwartzel

Correction of the gaze direction for a videophone

An ultrasonic head is a linear array consisting of a plurality of transducer elements. The array is perpendicular to a sectional plane of the object under study and can be rotated about its longitudinal axis. Several groups each consisting of jointly controlled transducer elements are driven to form a beam aperture. Between each two adjacent driven groups there is provided at least one group that is switched off. The ultrasonic tomography unit thus obtained scans several parallel section levels one after the other or even, at least approximately simultaneously, without additional mechanical movement.

Ultrasonic tomography unit

In an exemplary embodiment partial images of an object are obtained by scanning the object from different directions, e.g. by compound scanning. For a given object region or point, the different partial images may include a response maximum signifying a directionally reflecting region. Other object regions may provide echo signal amplitudes in a range signifying a locally isotropic scattering. According to the disclosure, the partial images are linked or combined taking account of the nature of the respective object regions as being directionally reflecting or nondirectionally scattering.

Method for processing ultrasonic echo signals of both directionally

In an exemplary embodiment, the processing techniques of computerized x-ray tomography are applied to improve resolution transverse to the depth direction, for example with the use of compound ultrasonic scanning. In this way, an improved preliminary image for representing non-directionally scattering image points is attained. The ultrasonic echo signals are also processed to provide a preliminary image based predominantly or exclusively on directionally reflecting image points. The respective preliminary images for each image point or point region are then suitably combined to provide a stored ultrasonic image capable of display of the scanned region of improved accuracy, resolution, and freedom from noise.

In an illustrative embodiment marks with dual x-ray permeable apertures are at three spaced locations on the mask and transmit x-ray beams which are directed obliquely to the semiconductor surface. In this case, the marks on the semiconductor disc may be formed by monocrystals shaped in conformity with the incident beam cross section and located so as to produce reflected x-ray beams which intersect correspondingly shaped further apertures of the respective dual aperture marks on the mask. Alternatively the beams may impinge on the surface of the semiconductor disc itself at an angle to produce reflection, with x-ray absorbing material surrounding each reflecting region. In either case the reflected beams as transmitted by the further apertures are detected as a measure of the degree of parallelism of the mask and semiconductor disc.

Method for the adjustment of a semiconductor disc relative to a

In the illustrative disclosure, alignment of x-ray masks, with elements in the submicron range for x-ray lithographic replication, is carried out with the use of through-bores in the set of masks and in the substrates. A single point x-ray source may be used to produce widely offset parallel beams defining the bore alignment axes, or the bores may be formed with oblique axes converging at a point, so as to be usable with diverging x-ray beams from a point x-ray source.

Growing community of inventors

Haar, Germany

Eckart Hundt