Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Leica Microsystems Lithography Gmbh (1 from 20 patents)
2. Vistec Electron Beam Gmbh (10 patents)
1 patent:
1. 6635395 - Method for exposing a layout comprising multiple layers on a wafer