Infineon Technologies Ag

Eckard Quandt

Juergen Zimmer

Bernhard Winkler

Joachim Wecker

Stephan Schmitt

Manfred Ruehrig

The invention relates to a force sensor having a layer sequence for determining a force acting on the layer sequence along a predefined force axis. The layer sequence includes, arranged successively in a vertical direction, a first magnetic layer with a first magnetization direction, a separating layer and a second magnetic layer with a second magnetization direction. Here, the first magnetization direction is secured with respect to the layer sequence. The second magnetic layer has a magnetostriction constant that is different from zero and a uniaxial magnetic anisotropy with an anisotropy axis. The uniaxial magnetic anisotropy is generated using shape anisotropy. The second magnetization direction encloses an angle of more than 0&#xb0; and less than 90&#xb0; with the force axis in the quiescent state, and the anisotropy axis encloses an angle of more than 0&#xb0; and less than 90&#xb0; with the force axis.

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Bonn, Germany

Eckard Quandt