Balzers Aktiengesellschaft

Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten

Eberhard Moll

Helmut Daxinger

Rainer Buhl

Marcel A Lardon

Renzo Zanardo

Walter Haag

Otto Winkler

Hans K Pulker

J G Van Agtmaal

Martin Bader

Wagner Rudolf

Edgar Muller

A workpiece support for supporting a disc-shaped workpiece in a vacuum chamber, comprises a support member with a support surface for carrying the workpiece. A plurality of bores extend from the support surface and through the support member. The bores communicate with a distribution chamber defined on a side of the support member which is opposite from the support surface. The distribution chamber is substantially co-extensive with the support surface and is connected to a gas feed line for supplying gas to the distribution chamber. The bores each have respective diameters which are substantially shorter than their respective lengths through the support member. In this way, gas supplied through the bores from the distribution chamber is distributed between the support surface and the workpiece as a heat transfer medium which is substantially independent from the gas flow at an inlet of each bore in the distribution chamber.

Workpiece support for vacuum chamber

A holding device for semiconductor disks or wafers orients and secures the disk during transport to a working position. Shortly before the disk reaches a working position the device releases the surface to be worked or secures the disk position with the aid of a ring which remains in the working position. Thereby the disk surface can be worked completely or with minimal shadowing and simultaneously the transport mechanics can be effectively protected against the working process, for example coating or etching. All parts continuously exposed to the working process can be readily exchanged. If the disk remains adhered in the working station, it is torn off by a form-fitting transport securement.

Holding device for a disk and application therefor

To manufacture tubes having a wear-resistant inside coating, such as gun barrels, hard material layers are deposited on the barrel and the layers are strain-hardened in their surface area by at least the ratio of the area by which the surface area is reduced by compression divided by the surface area of 0.001 (.DELTA.F/F=1.10.sup.-3) or reducing the area of the layer by 0.1%.

Tube having strain-hardened inside coating

For the vapor deposition of layers of oxides, nitrides, oxynitrides and carbides by ion plating, the surface to be coated is electrically insulated or mounted under insulation and during the coating an electric plasma is maintained in front of the surface to be coated, in such a way that the ion incidence density on the substrate is 0.5 to 2 mA per cm.sup.2 and the surface charges to a potential of -5 to -60 volts. Thereby especially hard and firmly adhering layers are obtained.

Method and apparatus for the reactive vapor deposition of layers of

To be able to treat the inside surface of metallic tubes by means of an electric glow discharge at pressures lower than heretofore in order to heat or coat such a surface, for example, an auxiliary electrode is positioned inside an article to be treated such as a tube extending close to the tube wall and parallel to the tube axis, with the auxiliary electrode and the tube being rotatable relative to each other. The apparatus and method are primarily for coating the inside of tubes.

Apparatus for treating the inside surface of an article with an electric

To heat articles in the vacuum container as uniformly as possible by bombarding them with electrons from a low voltage arc discharge, the plasma flame is not directed at the articles as hitherto usual, but caused to extend past the articles to be heated, by providing a magnetic field in which the lines of magnetic force favoring the propagation of the plasma extend in a direction skirting the surfaces of the articles. Preferably, a magnetic field is provided which is parallel to the axis of the plasma flame, and the articles to be heated are arranged cylindrically around the flame.

Method and apparatus for uniformly heating articles in a vacuum container

A method of evaporating an evaporative substance under vacuum comprises bombarding the evaporative substance with electrons from a low voltage arc discharge established between a cathode and an anode which is located in an evaporation chamber and simultaneously supplying additional power for evaporation to the evaporative substance by means of an electron gun which produces an electron energy in excess of one keV. A device for carrying out the invention comprises an evacuable bowl, an evaporation chamber with a receptacle therein for a substance to be evaporated and means for establishing a low voltage arc discharge between a cathode and an anode located in the evaporation chamber, a further provision of an electron gun for bombarding the substance with electrons which has an electron energy more than one kilovolt.

Method and apparatus for evaporating material under vacuum using both an

With elastic, particularly rubber-elastic bodies, the problem arises that an applied coating becomes fissured upon later deformation and may easily be abraded. According to the invention, the surface to be coated, for example, an elastic implant, is held in a stretched state during the deposition of the layer, such as a metal. Then, in a state of normal use, the produced layer forms a kind of shrunken skin which remains continuous even if the body is later deformed.

Method of coating the surface of an elastic body with a continuous layer

A sealing construction for the interconnection of two pipes in a vacuum cection, comprises, end flanges of the pipes which have conical sealing surfaces and including a substantially C-shape metallic ring disposed between the flanges which has at least a portion of its surface in rolling and sealing engagement with the conical surfaces of the flanges. The construction may also be used between a valve member which includes a plate having a conical sealing surface which is adapted to be sealed with a valve seal of a similar conical surface. The sealing ring may be used between conical surfaces which are substantially parallel or between those which converge or diverge with the use of an additional backing ring and, preferably, also with a centering ring.

Sealing construction for vacuum connection

A rotary displacement pump comprising a casing including a cylindrical in surface defining a stator chamber with an inlet and an outlet connected thereto. A cylindrical displacement body is movably mounted within the stator chamber having an outer surface which is movable into close association with the cylindrical inner surface along a line. A shaft is provided with an eccentric connected to the displacement body with a bearing to eccentrically move the displacement body within the stator chamber and move the line of close association in a circular path within the stator chamber. Gas tight spring bodies are connected between the displacement body and the casing for preventing rotation of the displacement body with respect to the casing and the displacement body is provided with first and second slide sealing members for dividing the stator chamber into an inlet base and an outlet base.

Rotary displacement pump with intake through a first sealing slide

A method and apparatus for evaporating materials in a vacuum evaporator by bombarding a material to be evaporated with electrons generated by a low voltage arc discharge sustained between a hot cathode and an anode comprising, locating the hot cathode in a chamber which is separated from an evaporation chamber wherein the hot cathode chamber communicates with the evaporation chamber through an aperture, connecting the material to be evaporated as the anode in the evaporation chamber, continuously introducing a gas into the hot cathode chamber while evacuating the evaporation chamber to maintain a pressure differential therebetween, and concentrating the beam of electrons by a magnetic field so as to obtain on the surface of the anode a power density sufficient for evaporation.

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Triesen, Liechtenstein

Eberhard Moll