Carl Zeiss Ag

Carl-Zeiss-Stiftung

Carl Zeiss Jena Gmbh

Carl Zeiss Gmbh

Eberhard Derndinger

Massimo Antonio Ghioni

Thomas Hartmann

Klaus Knupfer

Franco Zappa

Norbert Czarnetzki

Robert Grub

Sergio Cova

Peter Ott

Rudolf E Grosskopf

Thomas Scher&uuml;bl

Methods, apparatuses and computer programs for image processing, in particular image correction, are provided. A sequence of images is processed in this case. Fluctuations, for example as a result of air schlieren, may be recognized and compensated for by identifying a fluctuation signature.

Method and device for image correction

Methods, apparatuses and computer programs for image processing are provided. A sequence of images, in particular, is processed in this case. The images are subdivided into tiles and the tiles are transformed into the frequency domain. By evaluating the argument of the spectral density in the frequency domain, it is possible to identify and rectify disturbances which, for example, are caused by air disturbances (flickering).

Photodetector device comprising a semiconductor substrate () of a first type of conductivity connected to a first electrode (). Said substrate comprises an active area () made up of different semiconductor regions of a second type of conductivity () insulated from each other and connected to respective second electrodes () so that each of them can be connected separately from the others to an appropriate bias voltage. By regulating the bias voltages applied to these regions the function of optic diaphragm of the device can be controlled. The device works without needing any form of optical insulation between the different regions of the active area and always uses the same single output electrode for the signal in all the different situations of diaphragm adjustment.

Ultrasensitive photodetector with integrated pinhole for confocal microscopes

A confocal microscope has a motorized scanning table for moving the sample perpendicularly to the optical axis of the microscope. The object is illuminated simultaneously at many places by means of a light source array. The light reflected or scattered at the object is detected by means of a diaphragm array, which is conjugate to the object and to the light source array. A sensor array is provided as a detector and makes a displacement of charges possible between individual positions in the scanning direction. The sensor is a so-called TDI sensor. The displacement of the charges is synchronized with the motion of the object corresponding to the motion of the image points in the plane of the sensor array. The image data can thereby be recorded during the motion of the object, so that even large object fields can be sensed in a short time with high lateral resolution. The motion of the object takes place along linear paths (if necessary linear paths combined in a meander form) and the motion along the linear paths takes place uniformly. The microscope is particularly suitable for inspection in the semiconductor industry (wafer inspection, LCD inspection).

Confocal microscope with a motorized scanning table

A device is described for three-dimensional examination with a confocal beam path, in which an illumination grid (12; 22; 31; 83) is imaged in a focal plane (13f; 87), said plane being located on or in the vicinity of surface (14o) of object (14). The radiation reflected in the focal plane is imaged directly by a beam splitter onto the receiving surface of a CCD receiver (17; 91). The illumination grid (12; 22; 31; 83) is then imaged on the receiver surface either by the photosensitive areas of the receiver acting as confocal diaphragms or by signals from the detector elements which only receive light scattered outside focal plane (13f; 87) not being taken into account in the evaluation or being taken into account separately. The illumination grid size generated in focal plane (13f; 87) can be either fixed or variable. A variable illumination grid size can be produced for example by an LED array. The device also makes examinations in transmitted light possible.

Growing community of inventors

Aalen, Germany

Eberhard Derndinger