Government of the United States of America, As Represented by the Secretary of Commerce

E Clayton Teague

Richard A Allen

Michael W Cresswell

Loren W Linholm

William B Penzes

Fredric E Scire

Thomas Wheatley

Colleen H Ellenwood

A spatial RAM system uses the position of a data sensor to generate a clock pulse that is used to trigger data acquisition. As a consequence, the errors associated with time-based clock sampling are avoided. This enables more accurate sampling of data at locations desired in space and more easily allows for non-uniform sampling.

Spatial RAM for high precision data acquisition systems

A test structure for submicrometer metrology as used in integrated circuit manufacture comprises a bridge conductor divided into three segments by pairs of voltage taps. A first segment has no intermediate taps; a second segment has a number of dummy taps intermediate its ends; and a third segment has a single central tap, which may typically be formed in a different step than the remainder of the test structure, intermediate its ends. Preferably, the central tap extends from the same side of the bridge conductor as the taps at the ends of the third segment thereof. In order to evaluate a manufacturing operation, for example, to monitor the accuracy of registration of successive manufacturing steps, test signals are applied successively between the pairs of pads. Comparison of the response of the first and second segments to the test signals allows evaluation of the segment-shortening effect of the taps; comparison of the response of the two portions of the third segment to the test signals allows evaluation of their lengths, and thus of the offset, that is, the accuracy of registration of the step used to form the central tap. A plurality of substantially identical test structures are formed, for example, on an integrated circuit substrate. Offsets measured with respect to each of the substrates are summed using a least-squares technique, to allow separation of tool-wide misalignment errors and errors in the generation of a particular pattern or similar tool used to form a test structure. By summing the offsets measured with respect to a large number of test structures, random errors due to the presence of dust or other contaminants on the tools are effectively eliminated. The test structure according to the invention may also be used to calibrate optical measurements, or may be implemented as a line scale for direct optical measurements.

Electrical test structure and method for measuring the relative

A test structure for submicrometer metrology as used in integral circuit manufacture comprises a bridge conductor divided into three segments by pairs of voltage taps. A first segment has no intermediate taps; a second segment has a number of dummy taps intermediate its ends; and a third segment has a single central tap, which may typically be formed in a different step than the remainder of the test structure, intermediate its ends. Preferably, the central tap extends from the same side of the bridge conductor as the taps at the ends of the third segment thereof. In order to evaluate a manufacturing operation, for example, to monitor the accuracy of registration of successive manufacturing steps, test signals are applied successively between the pairs of pads. Comparison of the response of the first and second segments to the test signals allows evaluation of the segment-shortening effect of the taps; comparison of the response of the two portions of the third segment to the test signals allows evaluation of their lengths, and thus of the offset, that is, the accuracy of registration of the step used to form the central tap. A plurality of substantially identical test structures are formed, for example, on an integrated circuit substrate. Offsets measured with respect to each of the substrates are summed using a least-squares technique, to allow separation of tool-wide misalignment errors and errors in the generation of a particular pattern or similar tool used to form a test structure. By summing the offsets measured with respect to a large number of test structures, random errors due to the presence of dust or other contaminants on the tools are effectively eliminated.

A prepatterned potentiometer precursor includes a precursor substrate; and at least two spaced apart potentiometer precursor patterns on the substrate, each potentiometer precursor pattern including a bridge, two substantially similar end taps transverse to and extending from the bridge, and a center tap transverse to and extending from the bridge and centrally disposed between the end taps wherein the center taps of the bridges are substantially parallel to each other and are substantially wider than the end taps. A method of determining the distance between test features of test patterns on a test piece includes preparing a precursor substrate including at least two electrically conducting spaced apart potentiometer precursor patterns, each potentiometer precursor pattern including a bridge, two substantially similar end taps transverse to and extending from the bridge, and a center tap transverse to and extending from the bridge and centrally disposed between the end taps.

Method of and articles for accurately determining relative positions of

An improved flexure hinge permits both angular pivoting and longitudinal expansion and contraction and is made of a body member of solid material which is normally not flexible or expandable. A first recess is defined part-way through the body member at one longitudinally extending edge opposite second and third recesses defined through the opposite longitudinally-extending edge of the body member. The first recess is separated from each of the second and third recesses by web-like portions which are sufficiently thin to permit flexure of the body member about respective first and second axes extending through the first and second web portions, respectively. A stage, moveable along a single axis, employs four such body members, each body member having two double web hinge devices, one double web device being located at each end of the body member. The four body members are disposed symmetrically about the axis along which the stage is moved, and symmetrically about a transverse axis. The body members extend to the stage member from a surrounding frame.

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Gaithersburg, MD, United States of America

E Clayton Teague