Ams International Ag

Duy-Dong Pham

Mark Niederberger

Colin Steele

Thomas Froehlich

Thomas Christen

Lukas Perktold

Rene Scheuner

Thomas Fröhlich

René Blattmann

A MEMS sensor () comprises a MEMS transducer () being coupled to a MEMS interface circuit (). The MEMS interface circuit () comprises a bias voltage generator (), a differential amplifier (), a capacitor () and a feedback control circuit (). The bias voltage generator () generates a bias voltage (Vbias) for operating the MEMS transducer. The variable capacitor () is connected to one of the input nodes (I) of the differential amplifier (). At least one of the output nodes (A, A) of the differential amplifier is coupled to a base terminal (T) of an output filter () of the bias voltage generator (). Any disturbing signal from the bias voltage generator () is a common-mode signal that is divided equally on the input nodes (I, I) of the differential amplifier () and is therefore rejected.

MEMS sensor

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Duy-Dong Pham