Symphony Acoustics, Inc.

Lucent Technologies Inc.

Baker Hughes Corporation

Sandia Corporation

Other

Cornell Research Foundation Inc.

Agere Systems Inc.

Dustin Wade Carr

Gregory Robert Bogart

Flavio Pardo

Alex T Tran

Sungho Jin

Harold G Craighead

Dennis Stanley Greywall

Carl M Edwards

Hyongsok Soh

Zhenan Bao

Edwin Arthur Chandross

Vladimir Anatolyevich Aksyuk

David John Bishop

Timofei Nikita Kroupenkine

Robert A Boie

Victor Alexander Lifton

Anatoli Olkhovets

Steven R Patterson

Ho Bun Chan

Peter Kian-Hoon Ho

Lidija Sekaric

Michael Patrick Schlax

Jeeak M Parpia

Christopher John Frye

Joseph J Vuillemin

James Gilbert Helm

Bianca E N Keeler

An apparatus and method for estimating a parameter of interest using values of a beam property from two or more electromagnetic beams that both pass through at least part of an optical displacement device. The apparatus may include a Fabry-Perot interferometer, a collimated light source, and a detection array. At least one mirror of the interferometer may be operably coupled to an element receiving an external stimulus, such as pressure, force, and/or acceleration. The method includes using the apparatus.

Wide dynamic range interferometric transducer with divergent beam

Embodiments of environmental stimulus sensors comprising multiple sources and detectors for interrogating one or more optically resonant cavities that are responsive to one or more environmental stimuli are disclosed. Such sensors have, among other advantages, improved immunity to source and/or detector noise.

Resonant cavity sensor having multiple input optical signals at different angles

An apparatus and method for estimating a parameter of interest using a force responsive element comprising, at least in part, a balanced material. The balanced material is temperature insensitive over a specified range of temperatures such that the force responsive element may estimate the parameter of interest by responding to a desired force with relatively little interference due to temperature changes within the specified range of temperatures.

Temperature insensitive devices and methods for making same

An apparatus and method for estimating a parameter of interest using values of a beam property from two or more electromagnetic beams that both converge in an optical displacement device. The apparatus may include a Fabry-Perot interferometer, a light source, and a detection array. The electromagnetic beams may be converged one or more of: the interferometer and a convergence device. At least one reflective surface of the interferometer may be operably coupled to an element receiving an external stimulus, such as pressure, force, and/or acceleration. The method includes using the apparatus.

Multi-beam optical displacement sensor

A gravimeter for detecting a gravity difference between two points is disclosed. The gravimeter comprises an interferometric arrangement wherein the length of a reference arm is dependent upon the gravity local to a first accelerometer and the length of a sample arm is dependent upon the gravity local to a second accelerometer. A pair of photodetectors that operate in complimentary fashion provide electrical signals based on a first signal conveyed by the reference arm and a second signal conveyed by the sample arm. A change in the differential gravity between the two points induces equal and opposite changes to the magnitudes of the two electrical signals.

Gravity gradient sensor

Optical interferometric sensor

An accelerometer with improved immunity to sensitivity drift is disclosed. In some embodiments, the accelerometer comprises an actuator that induces a known acceleration on a reference frame. A signal based on this known acceleration is used to calibrate the accelerometer to mitigate the effects due to at least one of sensitivity drift, D.C. bias drift, sense laser wavelength drift, and resonant frequency drift.

Accelerometer with enhanced DC stability

A method for forming a structure comprising multiple parallel surfaces having a precise separation is disclosed. Precise separation and parallelism of the surfaces is achieved through the use of an adhesive mixture that comprises a plurality of spacers having a dimension substantially equal to the desired separation.

Parallel plate arrangement and method of formation

An apparatus and method for discriminating a directional component of a propagating pressure wave using an array of operatively-coupled displacement sensors are disclosed. In accordance with the illustrative embodiment, each displacement sensor in the array comprises two parallel layers, at least one of which is movable. The output signal of each displacement sensor is based on the separation of the layers. The displacement sensors are operatively-coupled through a compressible fluid such that the response of one of the sensors to an input can cause an output signal in at least one of the other sensors. The operative-coupling of the displacement sensors amplifies relative phase information between their respective output signals, which results in improved directionality. Some embodiments of the present invention are particularly well-suited for use in microphones.

Apparatus comprising a directionality-enhanced acoustic sensor

An optical displacement sensor is disclosed comprising a beam splitter having two optically coupled and mechanically coupled optically resonant cavities. The respective cavity lengths of the optically resonant cavities are functions of an environmental stimulus. By virtue of the optically coupled optically resonant cavities, the output of the beam splitter is less sensitive to input wavelength variation yet retains high sensitivity to the environmental stimulus.

Dual cavity displacement sensor

An accelerometer based on an optical displacement sensor is disclosed. An embodiment of the present invention directs a light beam toward an optically resonant cavity and detects both the reflected and transmitted optical beams that result from interaction with the optically resonant cavity. The optically resonant cavity has a cavity length that is based on the position of a proof mass that moves in response to an acceleration.

Accelerometer comprising an optically resonant cavity

An optical displacement sensor for sensing an environmental stimulus is disclosed. The optical displacement sensor exhibits an optical design that has suppressed back reflection and improved alignment tolerance between its optical components. The sensor is based on an optically resonant cavity whose cavity length is affected by the environmental stimulus. An embodiment of the present invention utilizes a lens to redirect a first light signal toward an optically resonant cavity such that the light is incident on the cavity at a non-normal angle of incidence.

Optical displacement sensor

An apparatus and method for detecting multiple beams from a beamsplitter is disclosed. Some embodiments of the present invention are particularly well-suited for use in microphones, high-sensitivity pressure sensors, vibration sensors, and accelerometer applications. Some embodiments of the present invention generate a differential electrical output signal that is based on multiple detected optical signals. The differential output signal is generated in response to an environmental stimulus, such as a pressure differential or incident acoustic energy. In accordance with the illustrative embodiment, an optical displacement sensor redirects the transmitted beam back through the optically-resonant cavity with an angular offset. Due to the angular offset, the redirected beam (i.e., retransmitted beam) transits the cavity with an intra-cavity path length that corresponds to substantially full transmittance of the retransmitted beam in the absence of the environmental stimulus.

Displacement sensor

An optical displacement sensor is disclosed that provides a optical displacement sensor that includes a optically-resonant cavity tuned to an operating wavelength without some of the disadvantages for doing so in the prior art. An embodiment of the present invention tunes an operating wavelength used with a Fabry-Perot interferometer to develop a desired relationship between the wavelength and the Fabry-Perot interferometer's initial cavity length.

Growing community of inventors

Albuquerque, NM, United States of America

Dustin Wade Carr