Samsung Display Co., Ltd.

DuckJung Lee

Sungsoon Im

Ji-Hee Son

Seungyong Song

Youngmin Moon

Minho Moon

Seul Bee Lee

Hye Yong Chu

Jinoh Kwag

Wonje Cho

An embodiment provides a deposition apparatus including a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck. In the mask frame, a first opening part is defined. The opening sheet is disposed on the mask frame. In the opening sheet, a second opening part overlapping the first opening part is defined. The deposition mask is disposed on the opening sheet. In the deposition mask, a plurality of third opening parts overlapping the second opening part are defined. The electrostatic chuck is disposed on the deposition mask and on which a substrate is disposed. The substrate is disposed on a surface of the electrostatic chuck, and AC power is applied to the deposition mask.

Deposition apparatus and method for seating mask of deposition apparatus

An etching device includes a nozzle unit including at least one nozzle including an etching solution injection hole, an etching solution collection hole, and a sealing part. The etching solution injection hole is configured to provide an etching solution to an etching object, the etching solution collection hole is configured to collect the etching solution, and the sealing part surrounds the etching solution injection hole and the etching solution collection hole to prevent the etching solution from leakage.

Etching device and etching method using the same

A mask assembly includes a mask frame including a cell opening, and an outer frame defined along a periphery of the cell opening, and a cell mask disposed on the mask frame and including a polymer material. The cell mask includes a masking part which includes a deposition part disposed corresponding to the cell opening of the mask frame and including a masking pattern, and a non-deposition part extending from the deposition part, and a bonding part overlapping the outer frame of the mask frame and extending from the masking part. The non-deposition part includes a non-pattern portion, and a pattern portion having a thickness smaller than a thickness of the non-pattern portion.

Mask assembly and manufacturing method thereof

A deposition mask includes a mask film including a polymer, a plurality of first deposition openings defined in the mask film. and a conductive layer which is on the mask film and receives a power. The conductive layer includes a first conductive pattern and a second conductive pattern spaced apart from each other along the mask film and electrically disconnected from each other. The conductive layer receives the power at the first conductive pattern and the second conductive pattern, and receipt of the power at the first conductive pattern and the second conductive pattern provides an electrostatic chuck function of the deposition mask.

Mask, method of providing mask, and method of providing display panel using the same

Provided is a mask having a plurality of cell areas, each of which has a plurality of through-portions defined therein. The mask includes a mask film including a polymer and a conductive layer disposed on at least one surface of the mask film and including conductive metal or a conductive metal oxide. Accordingly, precision of a deposition process is enhanced while reducing process time and costs in a manufacturing process of the mask, and thus the yield in manufacturing a display panel using the mask is improved. Therefore, the display panel manufactured using the mask may have improved reliability.

Mask, method for manufacturing the same, and method for manufacturing display panel

Provided is a mask which includes a mask body having a plurality of through hole portions and including a polymer film and a plurality of magnetic particles dispersed in the polymer film, and a polymer coating layer disposed on an outer surface of the mask body. Accordingly, the time and cost of manufacturing a mask are reduced and the precision of a deposition process is improved as well, so that the manufacturing yield of a display panel using the mask is improved and a display panel manufactured using the same has improved reliability.

Mask, method of manufacturing the same, and method of manufacturing display panel

A transparent display device including a base substrate, a plurality of pixels disposed on the base substrate, each pixel having an emission area and a transmission area transparent to external light, a circuit element layer disposed on the base substrate, a first electrode disposed on the circuit element layer and corresponding to the emission area, a pixel define layer disposed on the circuit element layer, the pixel define layer including a first sidewall defining the emission area and a second sidewall defining the transmission area, an emission layer disposed on the first electrode and corresponding to the emission area, and a second electrode disposed on the emission layer and including an opening that corresponds to the transmission area, in which the first sidewall is inclined at a first angle, and the second sidewall is inclined at a second angle greater than the first angle.

Method of manufacturing transparent display device

A transparent display device including a base substrate and a plurality of pixels disposed on the base substrate, each pixel having an emission area and a transmission area transparent to external light, each of the pixels including a circuit element layer disposed on the base substrate, a first electrode disposed on the circuit element layer and corresponding to the emission area, a pixel define layer disposed on the circuit element layer, the pixel define layer including a first sidewall defining the emission area and a second sidewall defining the transmission area, an emission layer disposed on the first electrode and corresponding to the emission area, and a second electrode disposed on the emission layer and including an opening that corresponds to the transmission area, in which the first sidewall is inclined at a first angle, and the second sidewall is inclined at a second angle greater than the first angle.

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Hwaseong-si, South Korea

DuckJung Lee