Fei Comapny

Duarte Guerreiro Tome Antunes

Cornelis Sander Kooijman

Bart Jozef Janssen

Nikolaos Kontaras

The invention relates to a method for analyzing an analogue signal comprising randomly spaced events having an event height. The method includes irradiating a sample with a focused beam of energetic electrons, detecting emission from the sample in response to such irradiation, and converting an analog signal of the emissions to a stationary time signal. The method further includes determining an estimated noise contribution for the stationary time signal, and determining an estimated event height of an event based on the stationary time signal and the estimated noise contribution for the stationary time signal, and determining, based on the estimated event height, an energy of the emission detected by the detector. This method is particularly useful for X-ray detectors, such as Silicon Drift Detectors, used in a SEM. By estimating the noise contribution to the signal, the step height is estimated with improved accuracy.

Pulse processing

A system for analyzing an analogue signal comprising randomly spaced events, the event having an event height, comprises:

Growing community of inventors

Eindhoven, Netherlands

Duarte Guerreiro Tome Antunes