Endress + Hauser Gmbh + Co. Kg

Drewes Ulfert

Andreas Rossberg

Thomas Uehlin

Nils Ponath

Martin Burgard

A pressure sensor comprises an operating circuit and a pressure-measuring cell comprising a counter body, a measurement membrane, which is arranged on the counter body and can be deformed by a pressure to be measured, and a capacitive transducer, which has at least one membrane electrode arranged on the measurement membrane and at least one counter-body electrode arranged on the counter body. The capacitance between the membrane electrode and the counter-body electrode depends on a pressure-dependent deformation of the measurement membrane, wherein at least the membrane electrode has a temperature-dependent impedance. The operating circuit is designed to sense at least one capacitance between the at least one counter-body electrode and the at least one membrane electrode and to provide a pressure measurement value on the basis of at least one capacitance and to determine the impedance of the membrane electrode&#x2014;particularly, the ohmic portion of the impedance of the membrane electrode.

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Mullheim, Germany

Drewes Ulfert