Applied Materials, Inc.

Drew Arnold

David George Armour

Simon Herbert Povall

Amir Hamed Al-Bayati

Adrian John Murrell

Bernard F Harrison

Paul A Burfield

David Richard Burgin

Andrew Holmes

Andrew James Timothy Holmes

Chris James Burgess

Erik Jan Hilda Collart

An ion implanter has an ion source () and an ion beam extraction assembly () for extracting the ions. The extraction assembly () is a tetrode structure and one of the pairs of extraction electrodes () has left and right ports () located in opposite sides of the ion beam emerging from the ion source (). The left and right electrode ports () are electrically isolated from each other and connected to independent voltage sources (). The ion implanter also has a baffle plate () at the entrance to a mass analyser () downstream of the extraction assembly (). The baffle plate () is also split into two halves (' and&#x2033;). By measuring the beam current incident on the two halves (&#x2033;) of the baffle (), the relative voltages supplied to the left and right electrode parts () may be adjusted so as to steer the ion beam and adjust the angle of incidence of the longitudinal axis thereof relative to the input of the analysing magnet ().

Apparatus and method for monitoring and tuning an ion beam in ion implantation apparatus

An ion beam generation apparatus comprising an ion source ( ) for generating ions, and a tetrode extraction assembly ( ) comprising four electrodes for extracting and accelerating ions from the ion source. The extraction assembly comprises a source electrode ( ) at the potential of the ion source, an extraction electrode ( ) adjacent to the source electrode to extract ions from the ion source ( ), a ground electrode ( ), and a suppression electrode ( ) between the extraction electrode and the ground electrode. Each electrode has an aperture to allow the ion beam to pass therethrough. The gap between the extraction ( ) and suppression ( ) electrodes is variable in the direction of ion beam travel.

Ion beam generation apparatus

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San Jose, CA, United States of America

Drew Arnold