Kla-tencor Technologies Corporation

Dragos Maciuca

Tao-Yi Fu

Natale Ceglio

Grace Jing Chen

A filter to selectively block light from passing through the filter and to selectively permit light to pass through the filter. The filter includes an array with a plurality of individually addressable filter elements. Each filter element is selectively settable to have a variable transmittance to the light of between substantially zero percent and substantially one hundred percent. In this manner, the filter according to the present invention provides areas that pass only a portion of the light, and thus can block the light using patterns other than just an abrupt on/off filtering. By so doing, the filter is able to dramatically reduce, and in some embodiments eliminate, the light ringing that typically accompanies such on/off filters.

Spatial light modulator fourier transform

An imaging system for detecting defects on a substrate. Sensor module ports are disposed on an imaging platform. Sensor modules are removably connected to the sensor module ports, and are adapted to sense swaths on the surface of the substrate. Each of the sensor modules includes a time domain integration sensor, optics, an analog controller, and a digital controller. The time domain integration sensor optically senses the swath. The optics focus light from the swath on the time domain integration sensor. The analog controller receives signals from the time domain integration sensor and provides data signals. The digital controller receives the data signals, integrates the data signals into an image of the swath, and provides the image as digital signals to the sensor module port. A master controller receives the digital signals, composites them into a single image of a desired portion of the surface of the substrate, and detects defects within the image. A stage moves the substrate under the sensor modules under the control of the master controller, until the desired portion of the surface of the substrate has been imaged.

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Castro Valley, CA, United States of America

Dragos Maciuca