Sumitomo Heavy Industries, Ltd.

Doutaro Usui

Takashi Ikeda

Daisuke Shinohira

Kotaro Wada

A linear motor includes a movable element and a stator. The stator includes a pair of back yokes provided opposing each other such as to flank the movable element along a direction perpendicular to the movable element's axis of travel, a plurality of main pole magnets provided spaced apart from each other and paralleling the axis of travel, on respective inside lateral surfaces of the pair of back yokes, and first and second interpole magnets provided, adjoining along said axis of travel, in each of intervals between adjoining couples of the main pole magnets.

Linear motor, magnet unit, and stage device

A flat coil includes at least first and second coil layers having the shape of a ring and stacked, each of the first and second coil layers includes a pair of linear portions facing each other in a first direction and a pair of end portions facing each other in a second direction crossing the first direction, and the flat coil is bent on at least one of the end portions. The flat coil is an &#x3b1;-winding coil and is bent toward the first coil layer from the second coil layer. A first end face of the first coil layer in the second direction and a second end face of the second coil layer in the second direction are positioned on the same plane at the end portion to be bent.

Coil and method of manufacturing coil

A linear motor includes a mover movable in a first direction and a stator. A yoke includes a pair of back yokes provided opposite to each other so as to sandwich the mover in a second direction perpendicular to the first direction. A plurality of field magnets are provided on an inner lateral surface of each of the pair of back yokes in the first direction. A pair of auxiliary magnets are provided (i) on end lateral surfaces of the back yokes and (ii) in the vicinity of the field magnets at the extreme end provided in the back yoke. A magnetic member is provided to surround the pair of auxiliary magnets.

Linear motor

A linear motor cooling structure for cooling a coil constituting a driving section of a linear motor includes a flat plate cooling section which forms a flow path for cooling water for cooling the coil in an inside between a plurality of flat plate members by overlapping the plurality of flat plate members, wherein the flat plate cooling section includes an inflow opening for inflow of the cooling water and an outflow opening for outflow of the cooling water, which are respectively provided at both ends thereof, and the flat plate cooling section comes into close contact with the coil.

Linear motor cooling structure

A linear motor cooling structure includes an inflow section for inflow of cooling water, an outflow section for outflow of the cooling water, and a flat plate cooling section which includes an inflow opening for inflow of the cooling water from the inflow section, an outflow opening for outflow of the cooling water to the outflow section, and a flow path which makes the cooling water which has flowed in from the inflow opening flow through an inside thereof and flow out from the outflow opening, wherein the inflow section, the flat plate cooling section, and the outflow section are connected, and the inflow section and the inflow opening communicate with each other and also the outflow opening and the outflow section communicate with each other.

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Yokosuka, Japan

Doutaro Usui