Matsushita Electric Industrial Co., Ltd.

Doukei Choo

Shigeki Yamane

Yoshiaki Takenaka

Daiji Narita

A microwave excited gas laser apparatus includes a single unit having at least first, second, third, and fourth waveguides. The first and second waveguides meet at a first intersection. The third and fourth waveguides meet at a second intersection. A discharge tube contains a laser medium gas, and extends through the first and second intersections. Microwaves are radiated into the first, second, third, and fourth waveguides. The discharge tube in the first intersection is exposed to a microwave propagated along the first waveguide and a microwave propagated along the second waveguide. The discharge tube in the second intersection is exposed to a microwave propagated along the third waveguide and a microwave propagated along the fourth waveguide.

Microwave excited gas laser apparatus

A laser apparatus includes an output mirror and a total reflection mirror. A discharge tube is located between the output mirror and the total reflection mirror. The discharge tube contains laser medium gas. A first block connected to a first end of the discharge tube supports the first end of the discharge tube and also the output mirror. A second block connected to a second end of the discharge tube supports the second end of the discharge tube and also the total reflection mirror. A third block connected to an intermediate portion of the discharge tube supports the intermediate portion of the discharge tube. An optical bench supports the first block, the second block, and the third block. A turboblower connected to the third block is supported by the third block. A first passage connects the turboblower and the first block. A second passage connects the turboblower and the second block. The turboblower draws the laser medium gas from the discharge tube via the third block and returns the laser medium gas to the discharge tube via the first passage, the second passage, the first block, and the second block.

Gas laser apparatus with gas circulation arrangement

Carbon dioxide gas is fed in a metallic laser tube extending along an optical axis through a plurality of gas feeding tubes placed outside the optical axis and is taken out from the metallic laser tube by a blower to circulate the carbon dioxide gas, and the carbon dioxide gas held in the metallic laser tube is cooled by a gas cooling element. A pair of microwaves in which electric fields oscillated in different directions are induced are injected from a pair of gas injecting points of the gas feeding tubes close to the ends of the metallic laser tube and are combined in the metallic laser tube. Therefore, the carbon dioxide gas held in the metallic laser tube is uniformly excited by receiving the energy of the combined microwave, light is emitted from the excited carbon dioxide gas, the emitted light is repeatedly reflected along the optical axis by a total reflecting mirror and a partial reflecting mirror placed on both end sides of the metallic laser tube, and the emitted light passes through the partial reflecting mirror. Because the microwaves are injected from the gas injecting points placed outside the optical axis, the emitted light is stable resonated, a velocity of the carbon dioxide gas can be lowered, and a length of the metallic laser tube can be shortened.

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Amagasaki, Japan

Doukei Choo