Parker-hannifin Corporation

Douglas Schenk

Kenneth W Cornett

Jeremy Payne

Eugene J Mannella

Stephen J Coppola

Julian Kamibayashiyama

Dan Funke

William P Yetter

Jeffrey D Navarro

Don Bowman

Jeff Navarro

Donald J Peterson

Darrell W Rall

A system and for determining health of a fluid seal member including a fluid seal member; a transducer in force transmitting contact with the fluid seal member to generate an output signal based on an amount of force and/or pressure applied to the transducer; a radio frequency (RF) transponder operably coupled to the transducer to store the output signal of the transducer; a reader within an operable distance from the RF transponder to transmit electromagnetic energy to the RF transponder and receive the output signal of the transducer stored in the RF transponder through a radio frequency communication link; and a processor coupled to the reader, to determine health of the fluid seal member.

System and method for monitoring health of a fluid seal member

A seal for sealing an interface between a container and a lid of a process chamber. The seal comprises a first seal element and a second seal element that are arranged to seal the interface in series, with the second seal element being situated to encounter processing activity upstream of the fist seal element. The first seal element has a deflectable portion and a protrusion extending radially from the deflectable portion. The second seal element has a radially extending recess in which the protrusion of the first seal element is received. The protrusion and recess interlock to restrict separation and/or rotation of the first and second seal elements. Inclined surfaces of the first seal element interact with the second seal element to apply axial sealing forces to sealing surfaces of the second seal member.

Substrate processing apparatus with composite seal

Sealing gasket construction for providing a fluid seal intermediate a pair of opposed, mating parts or structures. The gasket includes a metal retainer and a resilient seal element received in a groove formed into the retainer. Such groove is adapted to be fabricated by coining or a like sheet metal stamping or forming process.

Retainer gasket construction

A connection for threaded pipes and other tubular sections including a gasket for interposition between a first and an opposing second interface surface of the connection. The gasket includes a retainer and a generally annular seal element received in a groove formed into at least one side of the retainer. Such retainer side further is formed as having one or more channels extending extend radially through the groove and the inner or outer perimeter of the retainer. Each such channel defines a vent for relieving hydrostatic fluid pressure as the gasket is compressed between the interface surfaces.

Threaded pipe connection having a retainer gasket with pressure relief vents

A gasket for interposition between a first and an opposing second interface surface of a sealing assembly. The gasket includes a retainer and a generally annular seal element received in a groove formed into at least one side of the retainer. Such retainer side further is formed as having one or more channels extending extend radially through the groove and the inner or outer perimeter of the retainer. Each such channel defines a vent for relieving hydrostatic fluid pressure as the gasket is compressed between the interface surfaces.

Retainer gasket with pressure relief vents

A method of making a gasket of a variety which includes a generally annular retainer member having an inner and outer diametric extent which define a perimeter of a closed geometric shape, and at least one generally annular seal member formed of an elastomeric material and supported on the retainer member to be compressible intermediate a pair of interface surfaces for providing a fluid-tight seal therebetween. At least a first and a second retainer segment each is provided as extending intermediate a first end and a second end, and as having an inner periphery and an outer periphery. To form the retainer member, the first end of each of the retainer segments is connected to the second end of an adjacent segment such that the inner periphery of each segment defines a portion of the inner diametric extent of the retainer member, with the outer periphery of each segment defining a portion of the outer diametric extent of the retainer member. The seal member then is attached to the retainer member so as to formed a continuous ring of elastomeric material which extends along the perimeter of the retainer member.

Growing community of inventors

Chula Vista, CA, United States of America

Douglas Schenk