Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Fsi International, Inc. (1 from 102 patents)
1 patent:
1. 7556697 - System and method for carrying out liquid and subsequent drying treatments on one or more wafers