Advanced Energy Industries, Inc.

Other

Ampt, LLC

Concept Systems Design, Inc.

Douglas S Schatz

John G Harpold

Jerry D Siefkes

Richard A Scholl

Anatoli V Ledenev

Robert M Porter

Robert D Mailho

John M Dorrenbacher

A solar energy system () has aspects that can allow individualized control and analysis for overall field power control that can be used while harvesting maximum power from a solar energy source () and a string of solar panels () for a power grid (). The invention provides control of power at high efficiency with aspects that can exist independently including: 1) power management with switch disconnect control (), 2) sequenced start of a solar power system, 3) providing a safety output system that can be handled by installers and maintenance and advantageously controlled, 4) providing programmable power functionality controller () either on site or remotely from an administrative facility by radio transmission individual solar panel disconnect control (), 5) a system with pattern analyzer () for operational, installation, and maintenance indications, and 6) systems with individual solar panel string power simulator () for disparate components.

High efficiency remotely controllable solar energy system

An induction heating systems using a plurality of zones in a coil provides selective heating control for better uniformity especially for semiconductor and other thin film processing applications. By arranging the zones to have different resonance frequencies, the power supply may control the various zones by altering its frequency output. The power supply may also act to control the differential heating by switching among zones in conjunction with the frequency control, by sweeping through a variety of frequencies, by simultaneously providing power over different frequencies, by altering the residence time at each frequency, or by outputting different powers to each frequency or the like. Each zone may thus be tuned as appropriate to achieve the desired induction heating characteristic.

Frequency selected, variable output inductor heater system

A method and an apparatus are disclosed for sputter deposition of an insulating material on a substrate in a continuous mode of operation. A novel design for an anode assembly and driving power supply is disclosed to permit this. Single or multiple anodes are used, which at any given time may be biased negatively with respect to the plasma, so that any insulating material which may have been deposited thereupon may be sputtered away so as to provide a clean positive anode to the system, and at least for some period of time is biased positively so that it acts as an anode. The removal of any insulating material which may have formed on the anode structure permits its continuing effective use in collecting electrons from the plasma when it is biased positively, and therefore its continuing effective use as an anode for the system, permitting continuous operation of the system.

AC powered system for continuous deposition of a cathode material

A structure and method are disclosed which allow for a tighter control of the temperature across a wafer substrate. In accordance with the present invention, a wafer to be processed is heated to a constant and uniform temperature by an RF induction coil including a plurality of heating zones each of which being shunted by an associated capacitor tuned to a specific frequency. By adjusting the time during which current of a particular frequency is provided to the induction coil, current flow within, and thus the heat generated in, each of the zones may be independently controlled. Since the heat generated in the susceptor quickly changes in response to changes in current flow therein, both deviations of the wafer temperature from the processing temperature and temperature gradients across the surface of the wafer may be quickly corrected. This superior thermal response results in the present invention maintaining a wafer at a uniform temperature during heating and cooling with increased accuracy and precision.

Zone heating system with feedback control

Continuous deposition of insulating material using multiple anodes

Techniques for removing an electrical short caused by a flake in a thin film sputtering system are disclosed. The flake typically bridges the dark space between target and anode or shield and is removed through manipulation of the power supply utilized for normal operations. Sensing of the flake and discrimination between recoverable arcs is accomplished by timing the duration of an over-current condition. Removal involves switching between power mode or some other initial mode of regulation and current modes and progressively increasing current to melt the flake. Circuitry automatically removes the flake and is easily adapted to power supplies particularly more sophisticated, high frequency, lower energy storage DC supplies.

Apparatus for removal of electrical shorts in a sputtering system

Method for removal of electrical shorts in a sputtering system

Techniques for recovery from a low impedance conditions during cathodic arc or electric vapor thin film processes are disclosed. Sensing of a low impedance condition is achieved followed automatically by active clearing of the cloud to return it to the proper impedance or resistance state. Active clearing is accomplished by a progressive increase in the output of bias voltage supply. Regulation of the bias voltage supply switches between voltage or power modes and a current mode of regulation. Circuitry disclosed is designed to readily modify existing power supplies to achieve the methods discussed and to linearly increase the current output by it.

Growing community of inventors

Fort Collins, CO, United States of America

Douglas S Schatz