Integrated Sensing Systems, Inc.

Douglas Ray Sparks

Nader Najafi

Richard Thayre Smith

Michael W Putty

Bernard Edward Newman

Diane Riley

Rick Smith

Vincent Cruz

A micromachined tube (microtube) suitable for microfluidic devices. The microtube is formed by isotropically etching a surface of a first substrate to define therein a channel having an arcuate cross-sectional profile, and forming a substrate structure by bonding the first substrate to a second substrate so that the second substrate overlies and encloses the channel to define a passage having a cross-sectional profile of which at least half is arcuate. The substrate structure is thinned to define the microtube and walls thereof that surround the passage.

Microfluidic device and microtube thereof

A system for monitoring a charge-based physiological parameter within an internal organ of a living body, and a sensor adapted to be implanted in the living body and an organ therein. The sensor includes sensing elements adapted to sense the charge-based physiological parameter within the organ, and the sensing elements include at least first and second sensing elements that are electrically conductive, aligned, spaced apart and exposed at the exterior of the sensor. The sensor further includes a device for passing an alternating current from the first to the second sensing elements through an ionic solution contacting the sensing elements. The sensor also includes a device for generating a signal corresponding to the impedance of the ionic solution based on the alternating current.

System having wireless implantable sensor

Fluidic systems and methods of determining properties of fluids flowing therein. The fluidic systems and methods make use of a micromachined device that determines at least one property of the fluid within the system. The micromachined device includes a base structure on a substrate and a tube structure extending from the base structure and spaced apart from a surface of the substrate. The tube structure has at least one pair of geometrically parallel tube portions substantially lying in a plane, and at least one continuous internal passage defined at least in part within the parallel tube portions. A drive element induces vibrational movement of the tube structure in the plane of the tube structure and induces resonant vibrational movements in the tube portions in the plane of the tube structure. A sensing element senses deflections of each tube portion in the plane of the tube structure.

Fluidic systems and methods of determining properties of fluids flowing therein

A process for producing a micromachined tube (microtube) suitable for microfluidic devices. The process entails isotropically etching a surface of a first substrate to define therein a channel having an arcuate cross-sectional profile, and forming a substrate structure by bonding the first substrate to a second substrate so that the second substrate overlies and encloses the channel to define a passage having a cross-sectional profile of which at least half is arcuate. The substrate structure can optionally then be thinned to define a microtube and walls thereof that surround the passage.

Process of making a microtube and microfluidic devices formed therewith

A microfluidic device and sensing method that utilize a resonating tube configured to have sufficient sensitivity to be capable of sensing the volume of a gas present as bubbles in a liquid or the flow rate and/or density of a gas or gas mixture flowing through the tube. The tube has a freestanding tube portion supported above a surface of a substrate so as to be capable of vibrating in a plane normal to the surface of the substrate. As a gas-containing fluid flows through an internal passage of the tube, a drive signal vibrates the freestanding tube portion at a resonant frequency thereof. Coriolis-induced deflections of the freestanding tube portion are sensed relative to the substrate to produce an output corresponding to the sensed deflections, and the drive signal and/or the output are assessed to determine the volume, density and/or flow rate of the gas of the gas-containing fluid.

Microfluidic device and method of use

A microelectromechanical system (MEMS) device and a method for operating the device to determine at least one property of a fluid. The device includes a base on a substrate and a tube structure extending from the base and spaced apart from a surface of the substrate. The tube structure includes at least one tube portion and more preferably at least a pair of parallel tube portions substantially lying in a plane, at least one continuous internal passage defined at least in part within the parallel tube portions, and an inlet and outlet of the internal passage fluidically connected to the base. A drive element is operable to induce vibrational movement in the tube structure in a plane of the tube structure and induce resonant vibrational movements in the tube portions. A sensing element senses the deflections of the tube portions when the tube structure is vibrated with the drive element.

Microfluidic device and methods of operation and making

A process for fabricating multiple microfluidic device chips. The process includes fabricating multiple micromachined tubes in a semiconductor device wafer. The tubes are fabricated so that each tube has an internal fluidic passage and an inlet and outlet thereto defined in a surface of the device wafer. The device wafer is then bonded to a glass wafer to form a device wafer stack, and so that through-holes in the glass wafer are individually fluidically coupled with the inlets and outlets of the tubes. The glass wafer is then bonded to a metallic wafer to form a package wafer stack, so that through-holes in the metallic wafer are individually fluidically coupled with the through-holes of the glass wafer. Multiple microfluidic device chips are then singulated from the package wafer stack. Each device chip has a continuous flow path for a fluid therethrough that is preferably free of organic materials.

Process of fabricating microfluidic device chips and chips formed thereby

A fluid delivery system capable of delivering a precise amount of fluid, such as a fluid required for medical treatment. The delivery system makes use of an inline sensing unit that includes a housing comprising an inlet for receiving a fluid from a fluid source, an outlet for discharging the fluid from the housing, and at least one cavity between the inlet and the outlet. A sensing element and electronic circuitry are disposed within the at least one cavity. The electronic circuitry is adapted to produce an electrical output based on at least one response of the sensing element. The sensing unit is further equipped with a communication element for providing communication between the electronic circuitry and an electronic device remote from the housing.

Fluid delivery system and sensing unit therefor

A microelectromechanical system (MEMS) device and method for operating the device to determine a property of a fluid. The device has a tube that extends from a base and is spaced apart from a substrate surface for vibrational movement in a plane normal to the surface. The tube defines a continuous internal passage having a fluid inlet and fluid outlet fluidically connected to the base. A cantilevered member attached to a distal portion of the tube opposite the base is configured for vibrational movement relative to the distal portion. A drive electrode operable to induce vibrational movements in the tube and cantilevered member is disposed on the substrate surface. Sensing electrodes are disposed on the substrate surface for sensing Coriolis-induced deflections of the tube when vibrated, generating outputs from which a property of a fluid flowing through the tube can be determined.

Microfluidic device and method of operation

A method of treating a bodily fluid withdrawn and then returned to a living body. The method involves withdrawing the bodily fluid from the living body and causing the bodily fluid to flow through a treatment system, altering at least the density of the bodily fluid through the action of a second fluid as the bodily fluid flows through the treatment system, sensing at least the density and flow rate of the bodily fluid before the density thereof is altered by the second fluid, sensing at least the density and flow rate of the bodily fluid after the density thereof is altered by the second fluid, sensing at least the density and flow rate of the second fluid, controlling the density and/or flow rate of the second fluid based on the sensed densities and flow rates, and returning the bodily fluid to the living body.

Method of treating a bodily fluid

A fluid sensing system and method for sensing properties of a flowing fluid. The system and method entail a microfluidic device having a micromachined tube supported above a substrate, a tube passage within a freestanding portion of the tube, an inlet and outlet in fluidic communication with the tube passage and an exterior of the microfluidic device, elements for vibrating the freestanding portion of the tube, and elements for sensing movement of the freestanding portion of the tube so as to measure the vibration frequency and/or deflection of the freestanding portion and produce therefrom at least one output corresponding to a property of a fluid flowing through the tube passage. The system and method further entail placing the microfluidic device in a flowing fluid so that a fraction of the fluid enters the tube passage, and processing the output of the device to compute a property of the fluid.

System and method of assessing a property of a flowing fluid

A getter device including a substrate formed of a first getter material having a composition for gettering a first gas species, and a second getter material contacting an external surface of the substrate and having a composition for gettering a second gas species. The substrate has internal porosity connected to openings at its external surface, and the second getter material covers at least a portion of the external surface of the substrate but is absent from at least part of the internal porosity within the substrate so that the first getter material is exposed within the internal porosity for gettering the first gas species. According to a second aspect, a substrate is formed of a material transparent to radiation, and a film of getter material is deposited on the substrate to be sufficiently thin and/or porous so that the film is also transparent to the radiation transmitted through the substrate.

Getter device

A microfluidic device for assessing properties of a fluid. The device utilizes a microtube capable of different vibration modes for promoting certain performance and/or structural aspects of the device. The microtube is supported by a base so as to be spaced apart from a substrate surface. The microtube has a peripheral portion surrounding the base, arms supporting the peripheral portion from the base, and a continuous internal microchannel having at least first and second microchannel portions. Each microchannel portion defines a separate flow route, and each flow route originates at the base, continues through a portion of the peripheral portion, and returns to the base. The first and second microchannel portions are fluidically connected to inlet and outlet ports, respectively, within the base. Vibration of the microtube is induced and sensed by driving and sensing elements. Fluid properties are determined from outputs of the sensing elements.

Microfluidic device and microtube therefor

A microfluidic device and method for assessing properties of a fluid. The device includes a base supported by a substrate and a tube extending from the base and spaced apart from the substrate surface. The tube has an internal passage, first and second portions adjacent the base and defining, respectively, an inlet and outlet of the passage, and a distal portion. A drive electrode is located on the substrate surface adjacent the distal portion of the tube. Sensing electrodes are located on the substrate surface adjacent the first and second portions of the tube, and are adapted for sensing deflections of the first and second portions when vibrated with the drive electrode and from which the fluid property is determined. A pair of electrodes is located on the substrate surface between the drive and sensing electrodes, and are operated to enhance the performance of the microfluidic device, such as by supplementing the drive or sensing electrodes.

A microfluidic device a micromachined freestanding member adapted to sense one or more properties of a fluid flowing through the freestanding member. The freestanding member is supported by a substrate and spaced apart and separated from the substrate to enable the freestanding member to move relative to the substrate under the influence of a vibration-inducing element. Movement of the freestanding member relative to the substrate is then sensed by a sensing element. The freestanding member has an inlet, an outlet, an internal passage that fluidically couples the inlet and outlet, and a wall that defines and separates first and second passage portions of the internal passage that are arranged in fluidic series so that a fluid flowing through the internal passage flows through the first and second passage portions in opposite directions.

Growing community of inventors

Whitmore Lake, MI, United States of America

Douglas Ray Sparks