Momentive Performance Materials Gmbh

Advanced Ceramics Corporation

Douglas Alan Longworth

John T Mariner

Timothy J Hejl

Ajit Sane

Wei Fan

Jon Leist

David Michael Rusinko, Jr

Zhong-Hao Lu

Jeffrey Lennartz

Donald William Pultz, Jr

Thomas E Devan

Lawrence E Finley

Timothy J Heil

Andrew John Macey

Feng Liao

Eric Wintenberger

A containment vessel for evaporating materials for use in applying film coatings to a substrate includes a body fabricated from a refractory material. In one embodiment the body includes end portions capable of being connected to other bodies in an end to end fashion. In another embodiment, the body includes an integral patterned conductor incorporated into the outer surface portion of the body to facilitate association with an electrical power source for heating.

Large volume evaporation source

An article comprising a graphite part coated with a pyrolytic graphite (pG) for increased mechanical strength of at least 25% over an uncoated graphite part. In connector applications for use in a semiconductor processing assembly such as a heater, the pG coated component is overcoated with at least a protective layer of an electrically insulating material, and wherein part of the pG coated graphite part is exposed (uncoated with the protective layer) for providing electrical connections to the assembly.

Durable graphite connector and method for manufacturing thereof

A wafer processing device or apparatus, i.e., a heater or an electrostatic chuck, comprises a planar support platen, a support shaft having centrally located bore, and a pair of electrical conductors located in the shaft. In one embodiment, the electrical conductors are concentrically located within the bore of the shaft, with the first electrical lead being in the form of a pyrolytic graphite rod and separated from the outer second graphite electrical lead by means of a pyrolytic boron nitride (pBN) coating. In a second embodiment, the support platen and the support shaft are formed from a single unitary body of graphite. In yet another embodiment of the device of the invention, the connection posts comprise a carbon fiber composite and the exposed ends of the electrical connectors are coated with a protective ceramic paste for extended life in operations.

Wafer handling apparatus and method of manufacturing thereof

A heat treatment apparatus for use in batch heating/wafer processing is provided, which comprises a process chamber for receiving a wafer boat, at least a heating element comprising a substrate body configured to form an electrical heating circuit for at least one heating zone and encapsulated in a continuous overcoat layer, a heat reflector comprising a heat reflective surface disposed on the heating element, and the heating element has a ramp rate of at least 1&#xb0; C. per second for heating the wafers in the wafer boat.

Semiconductor batch heating assembly

A flash evaporator vaporization vessel for flash evaporating metal under conditions of repeated thermal cycling having a graphite body and an outer layer of pyrolytic boron nitride having a density above 2.15 gm/cc and preferably between 2.19 gm/cc and 2.2 gm/cc.

High density flash evaporator

A flash evaporator heater including a substrate formed of an intermetallic compound or of graphite and having an outer coating composed of pyrolytic boron nitride or pyrolytic graphite. The substrate has a substantially rectangular configuration with a substantially flat upper surface and a recessed cavity. The cavity has a longitudinal cross sectional geometry which forms a slope intersecting the substantially flat upper surface of the substrate at an angle .alpha. of less than 60 degrees.

Coated flash evaporator heater

A flash evaporator vaporization vessel for flash evaporating metal under conditions of repeated thermal cycling having a graphite body, an outer layer of pyrolytic boron nitride and an intermediate layer of a material selected from the group consisting of pyrolytic graphite, boron carbide (B.sub.4 C), tantalum carbide, and silicon carbide and having a thickness of no greater than about 0,002 inches.

Growing community of inventors

Brecksville, OH, United States of America

Douglas Alan Longworth