Yangtze Memory Technologies Co., Ltd.

Dou Dou Zhang

Yaobin Feng

Jun He

Jin Yu Qiu

Zhi Hu Gao

Zhi Yang Song

Embodiments of semiconductor fabrication methods are disclosed. In an example, a method for forming a mark for locating patterns in semiconductor fabrication is disclosed. A wafer is divided into a plurality of shots. Each of the plurality of shots includes a semiconductor chip die. Four quarters of a locking corner mark are subsequently patterned, respectively, at four corners of four adjacent shots of the plurality of shots. Each quarter of the locking corner mark is symmetric to adjacent quarters of the locking corner mark and is separated from the adjacent quarters of the locking corner mark by a nominally same distance. The locking corner mark is set as an origin for locating patterns in at least one of the four adjacent shots in semiconductor fabrication.

Growing community of inventors

Wuhan, China

Dou Dou Zhang