Intel Corporation

Doron Rubin

Li-Peng Wang

Eyal Bar-sadeh

Eyal Ginsburg

Alexander Talalyevsky

Richard O Jones

Oded Cohen

Alex Fang

An apparatus comprising a first core layer having a first thickness and a first refractive index; a second core layer formed on the first core layer, the second core layer having a second thickness and a second refractive index; and a grating formed at the interface between the first core layer and the second core layer. Corresponding process and system embodiments are disclosed and claimed.

Dual core corrugated Bragg grating

An apparatus and method to provide a tapered electrode in an acoustic resonator. A piezoelectric (PZ) layer, such as Aluminum Nitride (AlN), is formed over a bottom electrode having a tapered end. A top electrode is positioned on the PZ layer. The tapered end of the bottom electrode creates a mild topography to the under layer of the PZ material to prevent cracking in the PZ layer. The tapered end also decreases acoustic losses in the acoustic resonator because the PZ grains are highly oriented. In one embodiment, the acoustic resonator is a film bulk acoustic resonator (FBAR).

Tapered electrode in an acoustic resonator

An apparatus and method to provide a tapered electrode in an acoustic resonator. A piezoelectric (PZ) layer, such as Aluminum Nitride (AIN), is formed over a bottom electrode having a tapered end. A top electrode is positioned on the PZ layer. The tapered end of the bottom electrode creates a mild topography to the under layer of the PZ material to prevent cracking in the PZ layer. The tapered end also decreases acoustic losses in the acoustic resonator because the PZ grains are highly oriented. In one embodiment, the acoustic resonator is a film bulk acoustic resonator (FBAR).

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Givataim, Israel

Doron Rubin