Applied Materials Israel Limited

Doron Aspir

Ron Naftali

Yoram Uziel

Benzion Sender

Yuri Belenky

Yohanan Madmon

A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.

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Modiin-Macabim-Reut, Israel

Doron Aspir