Average Co-Inventor Count = 3.00
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (3 from 10,341 patents)
3 patents:
1. 9184047 - Multi-step system and method for curing a dielectric film
2. 8642488 - Multi-step system and method for curing a dielectric film
3. 7622378 - Multi-step system and method for curing a dielectric film