Asm IP Holding B.v.

DooHan Kim

YongGyu Han

KiChul Um

JeungHoon Han

WanGyu Lim

TaeHee Yoo

DongHyun Ko

A substrate support unit for thin film deposition on a substrate including a pattern structure and a thin film deposition apparatus including the substrate support unit includes a heater; an RF electrode; a first rod connected to the heater; a second rod connected to the RF electrode; and an RF shield spaced apart from the second rod, disposed to surround the second rod, and extending in an extension direction of the second rod.

Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same

A thin film deposition method with respect to a substrate including a pattern structure includes supplying RF power through a component disposed below a substrate, forming a potential on an exposed surface of the substrate exposed to a reaction space, moving the active species to the exposed surface in the reaction space using the potential, and forming a thin film including active species component on the exposed surface of the substrate.

Thin film deposition method

Growing community of inventors

Cheonan-si, South Korea

DooHan Kim