Samsung Electronics Co., Ltd.

Doo-Seon Lee

Chang-Sik Kim

Kun-Up Kim

Tae-Sik Son

In-Seok Hwang

Byoung-Joo Kim

Jong-hyoung Lim

Joon-Su Ji

Ho-Yeol Lee

Young-Kyo Ro

In an embodiment, a semiconductor device is tested using a probe pad that includes a probing region with which a probe needle makes contact, and a sensing region bordering an edge of the probing region. Electrical signals are applied, and measured results indicate the probe needle's location relative to a test position on the semiconductor device.

Probe pad, substrate having a semiconductor device, method of testing a semiconductor device and tester for testing a semiconductor device

A probe sensing pad used to detect a position of a probe needle includes a probe area, at least two sensing regions contacting peripheral portions of the probe area, sensing elements of different electrical characteristics connected to corresponding sensing regions, and at least one isolation region for electrically insulting the sensing regions. The position of the probe needle relative to the probe sensing pad may be rapidly detected and automatically corrected toward a desired contact site of the probe sensing pad depending upon the voltage measured by a probe needle contacting the probe sensing pad. That is, the measured voltage will have a first value if deflected in a first direction, a second value (different from the first) if deflected in a second direction, and so on. The position of the probe needle can be corrected based on this measurement.

Probe sensing pads and methods of detecting positions of probe needles relative to probe sensing pads

A probe card is provided which includes a plurality of stacked signal printed circuit boards for transmitting signals, and a plurality of ground printed circuit boards respectively interposed between the signal printed circuit boards. To reduce ground noise, each of the ground printed circuit boards includes a plurality of conductive ground regions which are insulated from each other.

Probe card

Growing community of inventors

Gyeonggi-do, South Korea

Doo-Seon Lee