Semes Co., Ltd.

Amorepacific Corporation

Doo Hyun Baek

Kyung Ho Choi

Sang-Oh Kim

Hong-Ju Shin

Wan Hee Jeong

Eun Sang Yoon

Ki Won Han

Hee Jae Byun

Kyo Bong Kim

Chan Young Choi

Hee Chan Kim

Nam Ho Chung

Min Beom Kim

Provided are a fireproof door apparatus, a fireproof structure, and a substrate treating facility. The fireproof door apparatus includes a fireproof shutter opening and closing a passage connecting two spaces, a release unit installed on one side of the passage and in the fireproof shutter and fixing the fireproof shutter in an open state using magnetic force or releasing the fireproof shutter that is fixed, and a gas spring connected to the fireproof shutter and moving the fireproof shutter toward the passage by heat of the fire to close the passage.

Fireproof door apparatus, fireproof structure and substrate treating facility

Embodiments of the inventive concept provide a wireless power apparatus for a substrate treating apparatus and a manufacturing method for the wireless power apparatus for the substrate treating apparatus for preventing a heat generation by preventing a generation of an eddy current in a coupling element, if the coupling element is used around an outer housing at which an induced magnetic field is formed. The inventive concept provides a wireless power apparatus for a substrate treating apparatus. The wireless power apparatus includes an outer housing having a main power line forming an induced magnetic field by receiving a power, and a coupling part coupling at least two components among components which are positioned at a periphery of the main power line for fixing the main power line; and an inner housing positioned spaced apart from the outer housing, generating an electromotive force through the induced magnetic field generated from the outer housing, and supplying the electromotive force which is generated to the substrate treating apparatus, and wherein the coupling part is formed of a material at which an eddy current is not generated by the induced magnetic field.

Wireless power apparatus for substrates treating apparatus and manufacturing method of wireless power apparatus for substrate treating apparatus

Growing community of inventors

Hwaseong-si, South Korea

Doo Hyun Baek