International Business Machines Corporation

Donna J Clodgo

Rosemary A Previti-Kelly

Erick G Walton

Ronald R Uttecht

Anita B Stratton

An improved insulation layer is formed by first preparing a solution by reacting water with an aminoalkoxysilane monomer in a solvent, using a critical mole ratio of water/monomer. After a sufficient aging period, the solution is coated onto a suitable surface, e.g. the surface of a semiconductor device, and then cured, in an essentially oxygen-free atmosphere, to a ladder-type silsesquioxane polymer. The insulation layer demonstrates excellent planarizing characteristics, while also exhibiting enhanced crack-resistance.

Planarizing ladder-type silsequioxane polymer insulation layer

A pattern is formed by first coating on a substrate a photosensitive organic polymer layer, and then an overlying film comprising an aminoalkoxysilane. After exposure in a predetermined pattern to radiation, the coated substrate is heated at a temperature so as to form an interfacial silicon-containing coupling layer between the film and the crosslinked portions of the polymer layer. Then, the coated substrate is contacted with a solvent so that the uncrosslinked portions of the polymer layer and the overlying portions of the film are simultaneously removed from the substrate. The process provides a high resolution, high aspect ratio pattern which demonstrates excellent etch resistance, while avoiding costly and cumbersome image transfer steps.

Etch resistant pattern formation via interfacial silylation process

Planarizing ladder-type silsesquioxane polymer insulation layer

By hydrolyzing an organoalkoysilane monomer at high concentration in solution to form a silanol, allowing the silanol to age to produce a low molecular weight oligomer, spin-applying the oligomer onto a substrate to form a discrete film of highly associated cyclic oligomer thereon, heat treating the oligomer film to form a modified ladder-type silsesquioxane condensation polymer, and then oxidizing the silsesquioxane in an O.sub.2 RIE, an organoglass is formed which presents novel etch properties. The organoglass can be used as an etch-stop layer in a passivation process.

Method for a plasma-treated polysiloxane coating

A lift-off metal deposition process in which a high temperature polyimide layer (i.e. a polyimide having a high imidization temperature) is applied to a first polyimide layer. The two layers are anisotropically etched through a photoresist mask to form vias in the first polyimide layer. After application of a metal layer, the high-temperature polyimide layer is lifted off the first polyimide layer, which remains as a passivation layer.

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Richmond, VT, United States of America

Donna J Clodgo