USA As Represented by Secretary of the Navy

US Government As Represented by the Secretary of the Army

Donna J Advena

Conrad W Terrill

Vincent T Bly

A fabrication technique for a test sample to characterize pyroelectric and erroelectric thin films for use in uncooled infrared focal plane arrays operated at a nominal 60 Hz. Most layers are patterned by a lift off technique, and those layers that are not lifted off are chemically etched or ion milled. The pyroelectric layer is thermally insulated from the substrate by a thick film layer of ZrO.sub.2. The pyroelectric layer is sandwiched between metal layers to form a capacitor. Direct measurement of the voltages between the capacitor plates, and of the temperature of these plates, results in a direct measurement of thin film temperature responsivity.

Test sample fabrication technique

Incident infrared radiation is focussed through a rotatable disk of germam onto a detector array. The disk has a thickness many times the wavelengths of the incident radiation and is partly covered with a pattern of germanium one-half wavelength of some preselected wavelength of the incident radiation. The pattern is a regular array of mesas, and acts as a phase grating which diffracts incident radiation. The diffracted (or blurred) image on the detector array is used as a reference level for background suppression.

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Vienna, VA, United States of America

Donna J Advena