International Business Machines Corporation

Donis G Flagello

Jane M Shaw

Fuad Elias Doany

David F Witman

Sampath Purushothaman

Naftali Eliahu Lustig

Harold John Hovel

Alessandro Cesare Callegari

David Earle Seeger

Douglas Andrew Buchanan

Andrew T Pomerene

Douglas C Latulipe, Jr

Howard M Clearfield

Fredric D Bailey

Christopher M Scherpereel

Jeffrey Donald Gelorme

Alan Edward Rosenbluth

Jeannine Madelyn Trewhella

Michael Hatzakis

Janusz S Wilczynski

Bunsen Fan

Edward D Babich

Modest M Oprysko

Jurij R Paraszczak

Albert Speth

The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond-like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.

Diamond-like carbon films from a hydrocarbon helium plasma

A simplified two-light valve configuration for high performance projection displays which eliminates much complexity and the costs associated with three-light valve projection displays, such as a crossed dichroic beam splitter cube, a long retrofocus projections lens, and the additional cost and complexity of a third light valve. Two reflective liquid crystal light valves are positioned and aligned relative to each other on two adjacent surfaces of a polarizing beam splitter cube. Illumination is introduced through a third face of the cube, and a projection lens images the two light valves through a fourth surface of the polarizing beam splitter cube. Color-sequential and alternating polarization states are provided by a color filter wheel or cage containing individual facets of dichroic or color glass filters, such that as the wheel or cage rotates, the filters change and produce sequential red, green and blue outputs. In addition, the polarization of adjacent colors is alternated by adding a polarizing film onto each color filter.

High performance projection display with two light valves

The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.

A composition containing an organosilicon material having terminal quinone groups, and a phenolic-novolak polymer, and use thereof in photolithography.

Alkaline developable photoresist composition containing radiation

A structure comprising a layer of polymeric material containing epoxy groups having preselected regions of different degrees of polymerization and different refractive indices; and a method for forming a structure comprising a layer of polymeric material containing epoxy groups having preselected regions of differing degrees of polymerization and differing refractive indices which comprises providing a polymeric material containing epoxy groups on a support and selectively modifying the refractive index in said material.

Polymeric optical waveguides and methods of forming the same

A system of establishing a conductive via path between spaced interlevel conductors. Successive layers of metallization separated by a dielectric are built. The vias are opened in one step to eliminate interlevel mashing. The system employs annular pads at locations where contact may be established to another wiring level. The vias are self-aligned and taper from top metal to first level contact. The system is applicable both chip-wise and carrier-wise.

Simultaneous multiple level interconnection process

A multi-layer structure that includes a transparent dielectric substrate, a layer of a nickel-containing steel alloy, and a layer of copper and/or chrome.

Multiple density mask and fabrication thereof

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Ridgefield, CT, United States of America

Donis G Flagello