Samsung Electronics Co., Ltd.

Dongryul Lee

Yoosang Hwang

Keunnam Kim

Yong Kwan Kim

Myeong-Dong Lee

Jimin Choi

Changhyun Cho

Minseong Choi

Chungsam Jun

Jeongho Ahn

Doyoung Yoon

Dongchul Ihm

A semiconductor wafer inspection system includes a wafer chuck disposed inside a chamber and on which a wafer is disposed, a light source configured to emit light for inspecting a pattern on the wafer to the wafer, an inspection controller configured to control the driving of the light source, a cooling gas gun disposed adjacent to the light source and configured to spray a cooling gas on a surface of the wafer, and a cooling controller configured to supply cooling air to the wafer chuck before light is emitted to the wafer and supply the cooling gas to the cooling gas gun.

Inspection system of semiconductor wafer and method of driving the same

According to some embodiments, a semiconductor device may include gate structures on a substrate; first and second impurity regions formed in the substrate and at both sides of each of the gate structures; conductive line structures provided to cross the gate structures and connected to the first impurity regions; and contact plugs connected to the second impurity regions, respectively. For each of the conductive line structures, the semiconductor device may include a first air spacer provided on a sidewall of the conductive line structure; a first material spacer provided between the conductive line structure and the first air spacer; and an insulating pattern provided on the air spacer. The insulating pattern may include a first portion and a second portion, and the second portion may have a depth greater than that of the first portion and defines a top surface of the air spacer.

Semiconductor devices and methods of fabricating the same

Growing community of inventors

Suwon-si, South Korea

Dongryul Lee