Wiinaa Co., Ltd.

Dongliang Chen

Lei Xu

Dongcheng Xie

A MEMS gas sensor (A) and array (B) thereof, a gas detection and preparation method. The gas sensor (A) comprises a first substrate (A) with a cavity (A) provided in a first surface, and a gas detection assembly (A) arranged at an opening of the cavity The gas detection assembly comprises: a supporting suspension bridge (A) erected on the opening of the cavity, and a gas detection part (A) arranged on the supporting suspension bridge. The gas detection part comprises a strip-shaped heating electrode part (A), an insulating layer (A), a strip-shaped detection electrode part (A) and a gas-sensitive material part (A), which are sequentially stacked. The strip-shaped detection electrode part comprises a first detection electrode part (A-) and a second detection electrode part (A-), with a first opening (A) provided between the A-and A-the gas-sensitive material part is arranged at the position of the first opening.

MEMS gas sensor and array thereof, and gas detection and preparation method

A MEMS gas sensor (A), array thereof, and preparation method therefor. The MEMS gas sensor comprises a first substrate (A) provided with a first cavity (A), and N gas detection assemblies (A) provided at an opening of A, each Acomprises: a supporting arm (A) and a gas detection part (A) provided on the A; the Acomprises a strip-shaped heating electrode part (A), an insulating layer (A), a strip-shaped detection electrode part (A), and a gas-sensitive material part (A) that are stacked sequentially; the Acomprises a first detection electrode part (A-) and a second detection electrode part (A-) with a first opening (A) therebetween; the Ais provided at the A; a first end of the Ais connected to the A-, a second end of the Ais connected to the A-; strip-shaped heating electrode parts in each Aare connected sequentially to form a heater (A).

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Anhui, China

Dongliang Chen